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Nanotechnology

Nanometrology

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Displaying 326 - 350 of 866

Optomechanical Motion Sensors

July 8, 2015
Author(s)
Felipe Guzman, Oliver Gerberding, John T. Melcher, Julian Stirling, Jon R. Pratt, Gordon A. Shaw, Jacob M. Taylor
Compact optical cavities can be combined with motion sensors to yield unprecedented resolution and SI-traceability in areas such as acceleration sensing and atomic force microscopy AFM, among others. We have incorporated Fabry-Perot fiber-optic micro

Electron beam induced current in the high injection regime

July 2, 2015
Author(s)
Paul M. Haney, Heayoung Yoon, Prakash Koirala, Robert W. Collins, Nikolai B. Zhitenev
Electron beam induced current (EBIC) is a powerful technique which measures the charge collection efficiency of photovoltaics with sub-micron spatial resolution. The exciting electron beam results in a high generation rate density of electron-hole pairs

The evolution of carbon nanotube network structure in unidirectional nanocomposites resolved by quantitative electron tomography

June 23, 2015
Author(s)
Bharath NMN Natarajan, Noa Lachman, Thomas F. Lam, Douglas Jacobs, Christian J. Long, Minhua Zhao, Brian L. Wardle, Renu Sharma, James A. Liddle
Carbon nanotube (CNT) reinforced polymers are next-generation, high-performance, multifunctional materials with a wide array of promising applications. The successful introduction of such materials is hampered by the lack of a quantitative understanding of

Characterization of Electrothermal Actuation with Nanometer and Microradian Precision

June 21, 2015
Author(s)
Craig R. Copeland, Craig D. McGray, Jon C. Geist, Vladimir A. Aksyuk, Samuel M. Stavis
A recently introduced particle-tracking method was used to measure the single motion cycles of an electrothermal actuator with nanometer and microradian precision. Driving the actuator with a low-noise input induced deterministic motion that was perfectly

Strong asymmetric charge carrier dependence in inelastic electron tunneling spectroscopy of graphene phonons

June 16, 2015
Author(s)
Donat F. Natterer, Yue Y. Zhao, Jonathan E. Wyrick, Yang-Hao Chan, Wen-Ying Ruan, Mei-Yin Chou, Kenji Watanabe, Takashi Taniguchi, Nikolai B. Zhitenev, Joseph A. Stroscio
The observation of phonons in graphene by inelastic electron tunneling spectroscopy has been met with limited success in previous measurements arising from weak signals and other spectral features which inhibit a clear distinction between phonons and

Nanoelectronic Structural Information with Scanning Probe Microscopes

June 14, 2015
Author(s)
Joseph J. Kopanski, Lin You, Jungjoon Ahn, Yaw S. Obeng
Scanning probe microscope (SPM) based methods to obtain subsurface structural information about nano-structured materials are described. A test structure chip containing structures to produce various surface electric field gradients, spatially varying

Characterizing the three-dimensional structure of block copolymers via sequential infiltration synthesis and scanning transmission electron tomography

May 26, 2015
Author(s)
Tamar Segal-Peretz, Jonathan P. Winterstein, Manolis Doxastakis, Abelardo Ramirez-Hernandez, Mahua Biswas, Jiaxing Ren, Hyo S. Suh, Seth B. Darling, James Alexander Liddle, Jeffrey Elam, Juan J. de Pablo, Nestor Zaluzec, Paul Nealey
Understanding and controlling the three-dimensional structure of block copolymer (BCP) thin films is critical for utilizing these materials for sub-20 nm nanopatterning in semiconductor devices, as well as in membranes and solar cell applications

Creating and Probing Electron Whispering-Gallery Modes in Graphene

May 8, 2015
Author(s)
Yue Y. Zhao, Jonathan E. Wyrick, Donat F. Natterer, Joaquin R. Nieva, Cyprian Lewandowski, Kenji Watanabe, Takashi Taniguchi, Leonid Levitov, Nikolai B. Zhitenev, Joseph A. Stroscio
Designing high-finesse resonant cavities for electronic waves is hampered by the short coherence lengths in solids. Previous approaches, e.g. the seminal nanometer-sized quantum corrals, depend on careful positioning of adatoms at clean surfaces. Here we

Nanoscale buckling of ultrathin low-k dielectric lines during hard-mask patterning

May 7, 2015
Author(s)
Gheorghe Stan, Cristian V. Ciobanu, Igor Levin, Mark van Veenhuizen, Alan Myers, Kanwal Singh, Christopher Jezewski, Barbara Miner, Sean King
Commonly known in macroscale mechanics, buckling phenomena are now frequently also encountered in the nanoscale world as reveled in today's cutting-edge fabrication of microelectronics. The description of nanoscale buckling requires precise dimensional and

Interactions of Higher Order Tip Effects in CD-AFM Linewidth Metrology

April 30, 2015
Author(s)
Ronald G. Dixson, Boon Ping Ng, Xavier Bonnaud, Ndubuisi Orji
A major challenge in critical dimension atomic force microscope (CD-AFM) width metrology is accounting for the effects of the tip on the apparent features in an image. The overall effect of the tip is to broaden the apparent width of lines and narrow the

Interactions of Microorganisms with Polymer Nanocomposites Containing Different Loadings of Oxidized Single and Multi-walled Carbon Nanotubes

March 27, 2015
Author(s)
David G. Goodwin , Kris M. Marsh, Iruhany B. Sosa, Julianne B. Payne, Justin Gorham, Edward J. Bouwer, D H. Fairbrother
The environmental fate and impact of polymer nanocomposites (PNCs) containing carbon nanotubes (CNTs) will depend upon their interactions with microorganisms, with implications for the antimicrobial properties and long term persistence of PNCs. Using

Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression

March 19, 2015
Author(s)
Mark Alexander Henn, Richard M. Silver, Nien F. Zhang, Hui Zhou, Bryan M. Barnes, Bin Ming, Andras Vladar, John S. Villarrubia
Hybrid metrology, e.g. the combination of several measurement techniques to determine critical dimensions, is an important approach to meet the needs of semiconductor industry. A proper use of hybrid metrology may not only yield more reliable estimates for
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