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Nanotechnology

Nanometrology

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Displaying 326 - 350 of 855

Characterizing the three-dimensional structure of block copolymers via sequential infiltration synthesis and scanning transmission electron tomography

May 26, 2015
Author(s)
Tamar Segal-Peretz, Jonathan P. Winterstein, Manolis Doxastakis, Abelardo Ramirez-Hernandez, Mahua Biswas, Jiaxing Ren, Hyo S. Suh, Seth B. Darling, James Alexander Liddle, Jeffrey Elam, Juan J. de Pablo, Nestor Zaluzec, Paul Nealey
Understanding and controlling the three-dimensional structure of block copolymer (BCP) thin films is critical for utilizing these materials for sub-20 nm nanopatterning in semiconductor devices, as well as in membranes and solar cell applications

Creating and Probing Electron Whispering-Gallery Modes in Graphene

May 8, 2015
Author(s)
Yue Y. Zhao, Jonathan E. Wyrick, Donat F. Natterer, Joaquin R. Nieva, Cyprian Lewandowski, Kenji Watanabe, Takashi Taniguchi, Leonid Levitov, Nikolai B. Zhitenev, Joseph A. Stroscio
Designing high-finesse resonant cavities for electronic waves is hampered by the short coherence lengths in solids. Previous approaches, e.g. the seminal nanometer-sized quantum corrals, depend on careful positioning of adatoms at clean surfaces. Here we

Nanoscale buckling of ultrathin low-k dielectric lines during hard-mask patterning

May 7, 2015
Author(s)
Gheorghe Stan, Cristian V. Ciobanu, Igor Levin, Mark van Veenhuizen, Alan Myers, Kanwal Singh, Christopher Jezewski, Barbara Miner, Sean King
Commonly known in macroscale mechanics, buckling phenomena are now frequently also encountered in the nanoscale world as reveled in today's cutting-edge fabrication of microelectronics. The description of nanoscale buckling requires precise dimensional and

Interactions of Higher Order Tip Effects in CD-AFM Linewidth Metrology

April 30, 2015
Author(s)
Ronald G. Dixson, Boon Ping Ng, Xavier Bonnaud, Ndubuisi G. Orji
A major challenge in critical dimension atomic force microscope (CD-AFM) width metrology is accounting for the effects of the tip on the apparent features in an image. The overall effect of the tip is to broaden the apparent width of lines and narrow the

Interactions of Microorganisms with Polymer Nanocomposites Containing Different Loadings of Oxidized Single and Multi-walled Carbon Nanotubes

March 27, 2015
Author(s)
David G. Goodwin , Kris M. Marsh, Iruhany B. Sosa, Julianne B. Payne, Justin Gorham, Edward J. Bouwer, D H. Fairbrother
The environmental fate and impact of polymer nanocomposites (PNCs) containing carbon nanotubes (CNTs) will depend upon their interactions with microorganisms, with implications for the antimicrobial properties and long term persistence of PNCs. Using

Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression

March 19, 2015
Author(s)
Mark Alexander Henn, Richard M. Silver, Nien F. Zhang, Hui Zhou, Bryan M. Barnes, Bin Ming, Andras Vladar, John S. Villarrubia
Hybrid metrology, e.g. the combination of several measurement techniques to determine critical dimensions, is an important approach to meet the needs of semiconductor industry. A proper use of hybrid metrology may not only yield more reliable estimates for

Beam broadening in transmission EBSD

March 16, 2015
Author(s)
Robert R. Keller, Katherine P. Rice, Mark Stoykovich
Transmission electron backscatter diffraction (t-EBSD), also known as transmission electron forward scatter diffraction (t-EFSD) or transmission Kikuchi diffraction in the SEM (TKD-SEM), can provide significant improvements in spatial resolution over

Photodetectors: High-Gain and Low-Driving-Voltage Photodetectors Based on Organolead Triiodide Perovskites (Adv. Mater. 11/2015)

March 12, 2015
Author(s)
Riu Dong, Yanjun Fang, Jungseok Chae, Jun Dai, Zhengguo Xiao, Qingfeng Dong, Yongbo Yuan, Andrea Centrone, Xiaocheng Zeng, Jinsong Huang
Methylammonium lead triiodide (CH3NH3PbI3) perovskite is an emerging low-cost, solution processable material which attracts great interest for enabling the fabrication of high performance optoelectronic devices such as solar cells, room temperature lasers

Investigating the Process of Surface Degradation and Nanoparticle Release of a Commercial Nanosilica / Polyurethane Coating Under UV Exposure

March 11, 2015
Author(s)
Deborah S. Jacobs, Yu L. Cheng, Savelas A. Rabb, Peter J. Krommenhoek, Lee L. Yu, Tinh Nguyen, Li Piin Sung
Considerable research has shown that many coatings properties such as mechanical, electrical, and ultra violet (UV) resistance are greatly enhanced by the addition of nanoparticles, which can potentially increase the use of nanocoatings for many outdoor

Self-Assembled Monolayers Impact Cobalt Interfacial Structure in Nanoelectronic Junctions

March 5, 2015
Author(s)
Sujitra J. Pookpanratana, Leigh Lydecker, Curt A. Richter, Christina A. Hacker
The formation of molecular monolayers on template-stripped cobalt surfaces is reported. The quality of the alkane-based molecular structure was confirmed through spectroscopic measurements. We find that the self-assembly of bifunctional molecules has

Near-Field Asymmetries in Plasmonic Resonators

February 12, 2015
Author(s)
Vladimir Aksyuk, Basudev Lahiri, Glenn Holland, Andrea Centrone
Surface-enhanced infrared absorption (SEIRA) spectroscopy exploits the locally enhanced field surrounding plasmonic metamaterials to increase the sensitivity of infrared spectroscopy. Light polarization and incident angle are important factors for exciting

Effects of wafer noise on the detection of 20 nm defects using optical volumetric inspection

February 11, 2015
Author(s)
Bryan M. Barnes, Francois R. Goasmat, Martin Y. Sohn, Hui Zhou, Andras Vladar, Richard M. Silver
Patterning imperfections in semiconductor device fabrication may either be noncritical [e.g., line edge roughness (LER)] or critical, such as defects that impact manufacturing yield. As the sizes of the pitches and linewidths decrease in lithography

In situ SEM Study of Lithium Intercalation in individual V2O5 Nanowires

February 5, 2015
Author(s)
Evgheni Strelcov, Joshua Cothren, Donovan Leonard, Albina Y. Borisevich, Andrei Kolmakov
Progress in rational engineering of Li-ion batteries requires better understanding of the electrochemical processes and accompanying transformations in the electrode materials on multiple length scales. In spite of recent progress in transmission electron
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