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Beam broadening in transmission EBSD

Published

Author(s)

Robert R. Keller, Katherine P. Rice, Mark Stoykovich

Abstract

Transmission electron backscatter diffraction (t-EBSD), also known as transmission electron forward scatter diffraction (t-EFSD) or transmission Kikuchi diffraction in the SEM (TKD-SEM), can provide significant improvements in spatial resolution over conventional EBSD performed in reflection in many cases. Over the last few years, truly remarkable results have been demonstrated, including phase identification of nanoparticles as small as 5 nm,effective orientation mapping resolutions of 2 nm to 3 nm for thin metal films, and high-contrast patterns from films as thin as 5 nm in plan-view.
Citation
Microscopy Today
Volume
23
Issue
02

Keywords

EBSD, t-EBSD, transmission electron backscatter diffraction, transmission Kikuchi diffraction

Citation

Keller, R. , Rice, K. and Stoykovich, M. (2015), Beam broadening in transmission EBSD, Microscopy Today, [online], https://doi.org/10.1017/S1551929515000048 (Accessed March 4, 2024)
Created March 16, 2015, Updated November 10, 2018