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Potential Application of Tip-Enhanced Raman Spectroscopy (TERS) in Semiconductor Manufacturing

Published

Author(s)

P.Y. Hung, Thomas E. O'Loughlin, Aaron Lewis, Rimma Dechter, Martin Samayoa, Sarbajit Banerjee, Erin L. Wood, Angela R. Hight Walker
Proceedings Title
Metrology, Inspection, and Process Control for Microlithography XXIX
Conference Dates
February 22-26, 2015
Conference Location
San Jose, CA
Conference Title
SPIE Advanced Lithography 2015
Created March 19, 2015, Updated November 10, 2018