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Potential Application of Tip-Enhanced Raman Spectroscopy (TERS) in Semiconductor Manufacturing

Published

Author(s)

P.Y. Hung, Thomas E. O'Loughlin, Aaron Lewis, Rimma Dechter, Martin Samayoa, Sarbajit Banerjee, Erin L. Wood, Angela R. Hight Walker
Proceedings Title
Metrology, Inspection, and Process Control for Microlithography XXIX
Conference Dates
February 22-26, 2015
Conference Location
San Jose, CA, US
Conference Title
SPIE Advanced Lithography 2015

Citation

Hung, P. , O'Loughlin, T. , Lewis, A. , Dechter, R. , Samayoa, M. , Banerjee, S. , Wood, E. and Hight Walker, A. (2015), Potential Application of Tip-Enhanced Raman Spectroscopy (TERS) in Semiconductor Manufacturing, Metrology, Inspection, and Process Control for Microlithography XXIX, San Jose, CA, US, [online], https://doi.org/10.1117/12.2175623, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917837 (Accessed April 22, 2024)
Created March 18, 2015, Updated October 12, 2021