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PUBLICATIONS

Potential Application of Tip-Enhanced Raman Spectroscopy (TERS) in Semiconductor Manufacturing

Published

Author(s)

P.Y. Hung, Thomas E. O'Loughlin, Aaron Lewis, Rimma Dechter, Martin Samayoa, Sarbajit Banerjee, Erin L. Wood, Angela R. Hight Walker
Proceedings Title
Metrology, Inspection, and Process Control for Microlithography XXIX
Conference Dates
February 22-26, 2015
Conference Location
San Jose, CA, US
Conference Title
SPIE Advanced Lithography 2015
Pub Type
Conferences

Download Paper

https://doi.org/10.1117/12.2175623
Local Download
Spectroscopy, Nanometrology, Materials characterization and Analytical chemistry

Citation

Hung, P. , O'Loughlin, T. , Lewis, A. , Dechter, R. , Samayoa, M. , Banerjee, S. , Wood, E. and Hight Walker, A. (2015), Potential Application of Tip-Enhanced Raman Spectroscopy (TERS) in Semiconductor Manufacturing, Metrology, Inspection, and Process Control for Microlithography XXIX, San Jose, CA, US, [online], https://doi.org/10.1117/12.2175623, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917837 (Accessed November 5, 2025)

Issues

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Created March 18, 2015, Updated October 12, 2021
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