@conference{820676,
  author = {P.Y. Hung and Thomas O'Loughlin and Aaron Lewis and Rimma Dechter and Martin Samayoa and Sarbajit Banerjee and Erin Wood and Angela Hight Walker},
  title = {Potential Application of Tip-Enhanced Raman Spectroscopy (TERS) in Semiconductor Manufacturing},
  year = {2015},
  month = {2015-03-19 00:03:00},
  publisher = {Metrology, Inspection, and Process Control for Microlithography XXIX, San Jose, CA, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917837},
  doi = {https://doi.org/10.1117/12.2175623},
  language = {en},
}