TY  - CONF
AU  - P.Y. Hung
AU  - Thomas O'Loughlin
AU  - Aaron Lewis
AU  - Rimma Dechter
AU  - Martin Samayoa
AU  - Sarbajit Banerjee
AU  - Erin Wood
AU  - Angela Hight Walker
C2  - Metrology, Inspection, and Process Control for Microlithography XXIX, San Jose, CA, US
DA  - 2015-03-19 00:03:00
DO  - https://doi.org/10.1117/12.2175623
LA  - en
PB  - Metrology, Inspection, and Process Control for Microlithography XXIX, San Jose, CA, US
PY  - 2015
TI  - Potential Application of Tip-Enhanced Raman Spectroscopy (TERS) in Semiconductor Manufacturing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917837
ER  -