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Metrology

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Displaying 2376 - 2400 of 2718

Round Robin Determination of Power Spectral Densities of Different Si Wafer Surfaces

March 1, 1998
Author(s)
Egon Marx, I J. Malik, Y Strausser, T Bristow, N Poduje, J C. Stover
Power spectral densities (PSDs) were used to characterize a set of surfaces over a wide range of lateral as well as perpendicular dimensions. Twelve 200-mm-diameter Si wafers were prepared and the surface finishes ranged from as-ground wafers to epitaxial

Tip Characterization for Scanned Probe Microscope Width Metrology

March 1, 1998
Author(s)
Samuel Dongmo, John S. Villarrubia, Samuel N. Jones, Thomas B. Renegar, Michael T. Postek, Jun-Feng Song
Determination of the tip shape is an important prerequisite for converting the various scanning probe microscopies form imaging tools into dimensional metrology tools with sufficient accuracy to meet the critical dimension measurement requirements of the

Uncertainty Analysis for Angle Calibrations Using Circle Closure

March 1, 1998
Author(s)
William T. Estler
We analyze two types of full-circle angle calibrations: a simple closure in which a single set of unknown angular segments is sequentially compared with an unknown reference angle, and a dual closure in which two divided circles are simultaneously

NIST Measurement Services: NIST Multifunction Calibration System

February 1, 1998
Author(s)
Nile M. Oldham, Mark E. Parker
The NIST automated Multifunction Calibration System (MCS) for voltage, current, and resistance is described. Developed primarily to calibrate digital multimeters and calibrators, the system can also be used to test thermal converters, and

Advances in NIST Standard Rockwell Diamond Indenters

January 1, 1998
Author(s)
Jun-Feng Song, Samuel R. Low III, David J. Pitchure, Theodore V. Vorburger
Recent developments in standard hardness machines and microform calibration techniques have made it possible to establish a worldwide unified Rockwell hardness scale with metrological traceability. This includes the establishments of the reference

Extinction Coefficients for Dielectric and Conducting Doublets of Spheres

January 1, 1998
Author(s)
Egon Marx
The extinction cross-sections of doublets of polystyrene and carbon spheres are determined using the optical theorem. The forward scattering amplitude is computed using the single integral equation method. The extinction cross-sections of the doublets are

Image Sharpness Measurement in Scanning Electron Microscopy - Part I

January 1, 1998
Author(s)
Michael T. Postek, Andras Vladar
This study introduces the idea of the sharpness concept in relationship to the determination of scanning electron microscope (SEM) perfomance. Scanning electron microscopes are routinely used in many manufacturing environments. Fully automated or

Improving Step Height and Pitch Measurements Using the Calibrated Atomic Force Microscope

January 1, 1998
Author(s)
R Koning, Ronald G. Dixson, Joseph Fu, V W. Tsai, Theodore V. Vorburger
The most important industrial application of Atomic Force Microscopy (AFM) is probably the accurate measurement of geometrical dimensions of small surface structures. In order to maintain the instrument''s performance and to achieve the high accuracy often

Measurement Traceability of NIST Standard Rockwell Diamond Indenters

January 1, 1998
Author(s)
Jun-Feng Song, Samuel R. Low III, Walter S. Liggett Jr, David J. Pitchure, Theodore V. Vorburger
A metrology-based Rockwell hardness scale is established by a standard machine and a standard diamond indenter. Both must be established through force and dimensional metrology with acceptably small measurement uncertainties. In 1994, NIST developed a

Metrological Timelines in Traceability

January 1, 1998
Author(s)
S D. Rasberry, Charles D. Ehrlich
Current developments and applications in the field of metrology have increased the need for correct and appropriate usage of the terms and concepts related to measurement traceability. Besides traceability itself, some of the interrelated terms include

NIST Microform Calibration - How It Benefits U.S. Industry

January 1, 1998
Author(s)
Jun-Feng Song, Theodore V. Vorburger
In microform metrology, complex 3-D surface features in the micrometer range must be quantified for their space and size including dimensions, curves, angles, profile deviations, and alignment errors, as well as surface roughness with measure uncertainties

Pixel Based Absolute Topography Test for Three Flats

January 1, 1998
Author(s)
R E. Parks, Lianzhen Shao, Christopher J. Evans
We demonstrate a new method of performing the absolute three flat test using reflection symmetries of the surfaces and an algorithm for generating the rotation of arrays of pixel data. Most of the operations involve left/right and top/bottom flips of data

Rapidly Renewable Lap: Theory and Practice

January 1, 1998
Author(s)
Christopher J. Evans, R E. Parks, David J. Roderick, Michael L. McGlauflin
The rapidly renewable lap (RRL) uses a textured substrate over which thin films are slumped. The substrate provides the geometry of the lap and a localized texture, depending on the film thickness, properties, and means by which it is deformed over and
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