U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Metrology

Search Publications

Search Title, Abstract, Conference, Citation, Keyword or Author
  • Published Date
Displaying 1851 - 1875 of 2718

Consumer Package Labeling Guide: Selling by Length and Area

May 2, 2006
Author(s)
K M. Dresser
[Withdrawn (February 12, 2018)] Guide is intended to provide manufacturers, packers, distributors, and retailers of packaged products with information about the labeling requirements for commodities that are sold by length and area in the consumer

Weights and Measures in the United States

April 11, 2006
Author(s)
Carol T. Hockert
What does the weights and measures system in the United States look like, and what impact does it have on commerce? Every state in the United States has its own weights and measures program, and many states have county and city run programs within their

Bias Reduction in Roughness Measurement through SEM Noise Removal

March 24, 2006
Author(s)
R Katz, C D. Chase, R Kris, R Peltinov, John S. Villarrubia, B Bunday
The importance of Critical Dimension (CD) roughness metrics such as Line and Contact edge roughness (LER, CER) and their associated width metrics (LWR, CWR) have been dealt with widely in the literature and are becoming semiconductor industry standards

Early Results From the NIST M48 CMM in the New AML Facility

March 3, 2006
Author(s)
John R. Stoup, Bryon S. Faust, Theodore D. Doiron
The Advanced Measurement Laboratory at NIST in Gaithersburg has already provided real, measurable improvement in some dimensional metrology measurement processes at NIST, most notably in the performance of the NIST Moore M48 coordinate measuring machine1

Koehler Illumination for High-Resolution Optical Metrology

March 1, 2006
Author(s)
Martin Y. Sohn, Bryan M. Barnes, Lowell P. Howard, Richard M. Silver, Ravikiran Attota, Michael T. Stocker
Accurate preparation of illumination is critical for high-resolution optical metrology applications such as line width and overlay measurements. To improve the detailed evaluation and alignment of the illumination optics, we have separated Koehler

Progress on Implementation of a CD-AFM Based Reference Measurement System

March 1, 2006
Author(s)
Ndubuisi G. Orji, Angela Martinez, Ronald G. Dixson, J Allgair
The National Institute of Standards and Technology (NIST) and SEMATECH are working to address traceability issues in semiconductor dimensional metrology. In semiconductor manufacturing, many of the measurements made in the fab are not traceable to the SI

The Limits of Image-Based Optical Metrology

March 1, 2006
Author(s)
Richard M. Silver, Bryan M. Barnes, Ravikiran Attota, Jay S. Jun, James J. Filliben, Juan Soto, Michael T. Stocker, P Lipscomb, Egon Marx, Heather J. Patrick, Ronald G. Dixson, Robert D. Larrabee
An overview of the challenges encountered in imaging device-sized features using optical techniques recently developed in our laboratories is presented in this paper. We have developed a set of techniques we refer to as scatterfield microscopy which allows

Traceable Atomic Force Microscope Dimensional Metrology at NIST

March 1, 2006
Author(s)
Ronald G. Dixson, Ndubuisi G. Orji, Joseph Fu, Michael W. Cresswell, Richard A. Allen, William F. Guthrie
The National Institute of Standards and Technology (NIST) has a multifaceted program in atomic force microscope (AFM) dimensional metrology. There are two major instruments being used for traceable measurements at NIST. The first is a custom in-house

Preparation of Reference Material 8504, Transformer Oil

February 1, 2006
Author(s)
Dianne L. Poster, Michele M. Schantz, Stephen A. Wise
A new reference material (RM), RM 8504, has been prepared for use as a diluent oil with Aroclors in transformer oil Standard Reference Materials (SRMs) 3075-3080 or SRM 3090 when developing and validating methods for the determination of polychlorinated

The development of procedures for impact testing

February 1, 2006
Author(s)
Thomas A. Siewert, Christopher N. McCowan
This report provides a broad overview of the progress in procedural improvements for impact testing. It includes a short summary of early developments, a discussion of topics that have been the subject of recent research, and a description of the

A Flexible System Framework for a Nanoassembly Cell Using Optical Tweezers

January 1, 2006
Author(s)
Arvind K. Balijepalli, Thomas W. LeBrun, Satyandra K. Gupta
The optical tweezers instrument is a unique tool for directed assembly of nanocomponents. In order to function as a viable nanomanufacturing tool, a software architecture is needed to run the optical tweezers hardware, provide an effective user interface

Correlation of Topography Measurements of NIST SRM 2460 Standard Bullets by Four Techniques

January 1, 2006
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Thomas Brian Renegar, Hyug-Gyo Rhee, A Zheng, L Ma, John M. Libert, Susan M. Ballou, B Bachrach, K Bogart
Three optical instruments including an interferometric microscope, a Nipkow disk confocal microscope and a laser scanning confocal microscope are used for the measurements of bullet profile signatures of a NIST (National Institute of Standards and

Correlation of Topography Measurements of NIST SRM 2460 Standard Bullets by Four Techniques

January 1, 2006
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Thomas Brian Renegar, Xiaoyu Alan Zheng, Hyug-Gyo Rhee, John M. Libert, Li Ma, K Bogart, Susan M. Ballou, B Bachrach
Three optical instruments including an interferometric microscope, a Nipkow disk confocal microscope and a laser scanning confocal microscope are used for the measurements of bullet profile signatures of a National Institute of Standards and Technology

Enhanced Capabilities of the NIST Fiber Probe for Microfeature Metrology

January 1, 2006
Author(s)
Bala Muralikrishnan, Jack A. Stone Jr., John R. Stoup
We have previously reported work in the area of fiber probe development at NIST for micro feature measurement. This probe, which we refer to as the Fiber Deflection Probe, functions by optically imaging the stem from two orthogonal directions a few

Fiber Deflection Probe for Small Hole Metrology

January 1, 2006
Author(s)
Balasubramanian Muralikrishnan, Jack A. Stone Jr., John R. Stoup
This paper presents the development of a new probing method for Coordinate Measuring Machines (CMM) to inspect diameter and form of small holes. The technique, referred to as fiber deflection probing, can be used for holes of approximately 100 mm nominal

Fiber Deflection Probe Uncertainty Analysis for Micro Holes

January 1, 2006
Author(s)
Bala Muralikrishnan, Jack A. Stone Jr., John R. Stoup
We have recently reported on a new probe, the Fiber Deflection Probe (FDP), for diameter and form measurement of large aspect ratio micro-holes (100 um nominal diameter, 5 mm deep). In this paper, we briefly review the measurement principle of the FDP

International Comparison of Surface Roughness and Step Height (Depth) Standards, SIM 4.8

January 1, 2006
Author(s)
K Doytchinov, F Kornblit, C C. Castellanos, J C. Oliveira, Thomas Brian Renegar, Theodore V. Vorburger
Calibration services of 5 countries from the SIM region are compared through measurements of surface roughness and step height standards. A surface roughness standard with a nominal Ra value of 0.2 mm, a surface roughness standard with a nominal Ra value

Large-Scale Metrology Instrument Performance Evaluations at NIST

January 1, 2006
Author(s)
William T. Estler, Daniel S. Sawyer, Bruce R. Borchardt, Steven D. Phillips
The ASME B89 Committee on Dimensional Metrology has approved a new American National Standard B89.4.19 - Performance Evaluation of Laser Based Spherical Coordinate Measurement Systems. This Standard, to be published in 2006, specifies test methods for

Nano- and Atomic-Scale Length Metrology

January 1, 2006
Author(s)
Theodore V. Vorburger, Ronald G. Dixson, Joseph Fu, Ndubuisi George Orji, Shaw C. Feng, Michael W. Cresswell, Richard A. Allen, William F. Guthrie, Wei Chu
We discuss nano-scale length metrology of linewidth, step height, and line edge roughness (LER). These properties are of growing importance to the function and specification of semiconductor devices as the dimensions of semiconductor devices shrink to the
Was this page helpful?