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Surface Metrology Algorithm Testing System

Published

Author(s)

Son H. Bui, Theodore V. Vorburger

Abstract

This paper presents the development of a Web-based surface metrology algorithm testing system. The system includes surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a web site at the National Institute of Standards and Technology (NIST), USA. Manufacturers, instrument makers, and researchers have Internet access to standard data sets and analysis tools located on a NIST server. The system serves to validate the accuracy of algorithms as well as the calculation of surface parameters in industry. The System can be accessed through http://ats.nist.gov/VSC/jsp.
Citation
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
Volume
31

Keywords

database, filtering, internet, parameters, software, surface, textures, topography, Web site

Citation

Bui, S. and Vorburger, T. (2007), Surface Metrology Algorithm Testing System, Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology (Accessed July 14, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2007, Updated February 19, 2017