TY  - JOUR
AU  - Son Bui
AU  - Theodore Vorburger
C2  - Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
DA  - 2007-01-01
LA  - en
M1  - 31
PB  - Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
PY  - 2007
TI  - Surface Metrology Algorithm Testing System
ER  -