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The National Institute of Standards and Technology is developing a dimensional pitch standard covering the range 1 ?m to 10 mm, intended for the calibration of microscope magnification and dimensional metrology instrument scales. While NIST has long
Matthew A. Davies, Y K. Chou, Christopher J. Evans
Topography of surfaces produced in finish hard turning using cubic boron nitride (CBN) tools is affected by a large number of factors including tool wear and the mechanics of the chip formation process. This paper shows first that tool wear rates are
Matthew A. Davies, Timothy J. Burns, Christopher J. Evans
The results of orthogonal cutting tests on electroplated Nickel-Phosphorus (15% phosphorus) and AISI 52100 bearing steel are presented and compared. For both materials, chips become segmented at relatively low cutting speeds (0.3 m/s to 2 m/s) due to the
Viewing rock art is a complex experience, just as is viewing any ohter art form. This experience may include knowledge of the site location, its time of creation, co-occurence with other rock art, stylistic correspondences (Kirsch 1996), and many other
R Koning, Ronald G. Dixson, Joseph Fu, V W. Tsai, Theodore V. Vorburger, Edwin R. Williams, X Wang
The use of the atomic force microscope (AFM) for step height and pitch measurements in industrial applications is rapidly increasing. To compare the results obtained by different instruments and to achieve high accuracy, the scales of an AFM must be
This report summarizes a workshop held on August 15, 1996, which provided an opportunity to U.S. industry in distributed and virtual manufacturing technologies to review and provide a critique of the Nanomanufacturing of Atom-Based Dimensional Standards
Gregory W. Caskey, Steven D. Phillips, Bruce R. Borchardt
This report examines the results of the ball plate round robin administered by NIST. The round robin was part of an effort to assess the current state of industry practices for measurements made using coordinate measuring machines. Measurements of a two
Steven D. Phillips, Bruce R. Borchardt, Daniel S. Sawyer, William T. Estler, David E. Ward, K Eberhardt, M. Levenson, Marjorie A. McClain, B Melvin, Ted Hopp, Y Shen
The calculation of task specific measurement uncertainty when using coordinate measuring machines is an important and challenging task. Current methods to address this issue use simulation techniques (e.g., the virtual CMM) where the propagation of known
In 1988, MIL-STD-45662A adopted the 4:1 Test Uncertainty Ratio (TUR); this was later incorporated into the ANSI/NCSL Z540-1 standard in 1994. However, in 1992, the National Institute of Standards and Technology (NIST) began to adopt a new method for
The scanning electron microscope (SEM) is an important research and production tool extensively used in many phases of industry throughout the world. The popularity of the instrument results from the need to inspect and obtain information about samples
This report presents explicit analytical expressions for the thermal expansion of a rod with heat input at one end and forced convection cooling along the length of the rod. When the rod is graduated for length measurement (i.e., a ruler or ball screw)
The non-vanishing size of tips in scanned probe microscopes (e.g., atomic force microscope or scanning tunneling microscope) results in imaging errors. Correction of these errors requires estimation of the tip shape (tip reconstruction) followed by
A proposal to develop the Industrial Applications of Scanned Probe Microscopy (IASPM) workshops, which NIST has co-sponsored with Sematech, the ASTM E42.14 subcommittee, and the American Vacuum Society, over the past four years into a forum for assisting
The scanning electron microscope (SEM) historically has been used mainly as an image-producing device and, in spite of certain obvious and sometimes serious electronics problems, serves in this function as an acceptable and effective instrument for many
This management report documents, as a case study, the development of a new industrial standard, SRM 2090, from the view point of the technologist. This report can be viewed as a generic template for the development of a state-of-the-art NIST standard. No
William T. Estler, Steven D. Phillips, Bruce R. Borchardt, Ted Hopp, G Witzgall, M Levenson, K Eberhardt, Marjorie A. McClain, Y Shen, X Zhang
We present the analysis of a simple mechanical model of a common type of kinematic seat touch trigger probe widely used on modern coordinate measuring machines (CMMs). The model provides a quantitative description of the pretravel variation or probe-lobing
Theodore V. Vorburger, Jun-Feng Song, T Giauque, Thomas Brian Renegar, Eric P. Whitenton, M Croarkin
A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser
Precision interferometric displacement measurements require deadpath corrections to account for variations in wavelength during the course of the measurement. This paper discusses common errors in applying deadpath corrections and describes the correction
The National Institute of Standards and Technology is developing a dimensional pitch standard covering the range 1 micrometers to 10 mm, intended for the calibration of microscope magnification and of dimensional metrology instrument scales. Called SRM
This paper describes a method for stitching multiple overlapping interferometric measurements of the equator of a high quality sphere to produce a single profile representing the roundness of the ball. The resulting optical profile measurement is compared
The deposition of electron bean-induced specimen contamination in both the transmission (TEM) and scanning electron microscopes (SEM) has remained a problem since the beginning of these forms of microscopy. Generally, sources of SEM contamination can be
The combination of the paradigms of shape algebras and predicate logic representations,used in a new method for describing designs, is presented. First order predicate logicprovides a natural, intuitive way of representing shapes and spatial relations
Standard Reference Material (SRM) 484 is an artifact for calibrating the magnification scale of a scanning electron microscope. Since 1977 the National Institute of Standards and Technology (NIST) has produced seven issues of SRM484 amounting to
Michael W. Cresswell, J Sniegowski, Rathindra Ghoshtagore, Robert Allen, L Linholm, John S. Villarrubia
Measurements of the linewidths of submicrometer features made by different metrology techniques have frequently been characterized by differences of up to 90 nm. The purpose of the work reported here is to address the special difficulties that this