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PUBLICATIONS

Integral Equations for Scattering by a Particle in a Layer

Published

Author(s)

Egon Marx

Abstract

The single integral equation method is applied to the scattering of electromagnetic waves by particles in a layer on top of a substrate. A second layer on top of the first one can have indentations.
Proceedings Title
1997 Digest of IEEE/APS International Symposium
Pub Type
Conferences

Keywords

electromagnetic scattering, integral equations, paint coatings, photoresist layer, point-matching method, resonance region
Manufacturing and Metrology

Citation

Marx, E. (1997), Integral Equations for Scattering by a Particle in a Layer, 1997 Digest of IEEE/APS International Symposium (Accessed December 11, 2023)

Created January 1, 1997, Updated June 2, 2021