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PUBLICATIONS

Stylus-Laser Surface Calibration System

Published

Author(s)

Theodore V. Vorburger, Jun-Feng Song, T Giauque, Thomas Brian Renegar, Eric P. Whitenton, M Croarkin

Abstract

A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser interferometer is mounted on the traversing unit of the stylus instrument to calibrate the instrument in the horizontal direction. The calibration uncertainty (¿2¿) for SRM 2075 is ¿1.2% for roughness calibrations ((Ra = 1 ¿m), and ¿0.06% for spatial wavelength calibrations (Sm = 800 ¿m).
Citation
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
Volume
19(2-3)
Pub Type
Journals

Keywords

calibration, roughness, sinusoidal profiles, stylus instruments, stylus-laser, surface texture, traceability, uncertainty
Metrology and Manufacturing

Citation

Vorburger, T. , Song, J. , Giauque, T. , Renegar, T. , Whitenton, E. and Croarkin, M. (1996), Stylus-Laser Surface Calibration System, Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology (Accessed October 7, 2025)

Issues

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Created September 30, 1996, Updated October 12, 2021
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