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Manufacturing

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Displaying 1376 - 1400 of 2179

Calibrated Overlay Wafer Standard

January 1, 2007
Author(s)
Michael T. Stocker, Richard M. Silver, Ravikiran Attota, Jay S. Jun
This document describes the physical characteristics of Standard Reference Material SRM 5000, provides guidance for its use in calibrating overlay (OL) tools, and gives information and precautions concerning its care and handling.Standard Reference

Comparison of Optical and Stylus Methods for Measurement of Rough Surfaces

January 1, 2007
Author(s)
Theodore V. Vorburger, H G. Rhee, Thomas B. Renegar, Jun-Feng Song, Xiaoyu A. Zheng
Abstract Optical methods are increasingly used for measurement of surface texture, particularly for areal measurements where the optical methods are generally faster. A new Working Group under Technical Committee (TC) 213 in the International Organization

Fundamental Limits of Optical Critical Dimension Metrology: A Simulation Study

January 1, 2007
Author(s)
Richard M. Silver, Thomas A. Germer, Ravikiran Attota, Bryan M. Barnes, B Bunday, J Allgair, Egon Marx, Jay S. Jun
This paper is a comprehensive summary and analysis of a SEMATECH funded project to study the limits of optical critical dimension scatterometry. The project was focused on two primary elements: 1) the comparison, stability, and validity of industry models

Helium Ion Microscopy: A New Technique for Semiconductor Metrology and Nanotechnology

January 1, 2007
Author(s)
Michael T. Postek, Andras Vladar, John A. Kramar, L A. Stern, John Notte, Sean McVey
The Helium Ion Microscope (HIM) offers a new, potentially disruptive technique for nano-metrology. This methodology presents an approach to measurements for nanotechnology and nano-manufacturing which has several potential advantages over the traditional

Higher Order Tip Effects in CD-AFM Linewidth Measurements

January 1, 2007
Author(s)
Ndubuisi G. Orji, Ronald G. Dixson
In critical dimension Atomic force microscopy (CD-AFM), a source of uncertainty is the tip. Measurements made using a CD-AFM tip show an apparent broadening of the width. Usually the results can be approximated if the tip-width is known. In addition to tip

Images of Strips On and Trenches In Substrates

January 1, 2007
Author(s)
Egon Marx
The computation of images of lines or strips on a substrate and trenches in a substrate or a layer above a substrate, all made of dielectric or absorbing materials, using integral equations equivalent to Maxwell's equations and using Fourier optics are

Laser Tracker Testing at NIST Using the ASME B89.4.19 Standard

January 1, 2007
Author(s)
Balasubramanian Muralikrishnan, Christopher J. Blackburn, Daniel S. Sawyer, Bruce R. Borchardt, William T. Estler, Steven D. Phillips
While the versatility and economics of laser trackers are quite appealing, the ability to assess their accuracy and to compare various brands has been limited by a lack of a national or international standard that encompasses testing and traceability

Laser Trackers: Testing and Standards

January 1, 2007
Author(s)
Steven D. Phillips
Laser trackers are now the tool of choice for large scale coordinate metrology. They are transportable allowing reconfigurable production facilities at a lower capital cost than large CMMs. Trackers now include absolute distance measuring (ADM) capability

Linewidth Measurement Based on Automatically Matched and Stitched Images

January 1, 2007
Author(s)
Wei Chu, Joseph Fu, Ronald G. Dixson, Theodore V. Vorburger
The emergence of ultra-sharp carbon nanotube (CNT) tips provides a new approach to minimize the distortion of the measured linewidth profile caused by interaction with the fmite probe tip size. However, the inevitable tilt angle resulting from attaching

Long Term Knowledge Retention Workshop Summary

January 1, 2007
Author(s)
Joshua Lubell, Eswaran Subrahmanian, William Regli, Sudarsan Rachuri
This report summarizes the presentations, discussions and recommendations of a workshop held at the National Institute of Standards and Technology on March 15-16, 2006. The purpose of the workshop was to identify challenges, research, and implementation

NIST Standard Bullets and Casings Project

January 1, 2007
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Susan M. Ballou, Thomas Brian Renegar, Li Ma, Eric P. Whitenton, David R. Kelley, Robert A. Clary, A Zheng, M Ols
The National INstitute of Standards and Technology (NIST) standard bullets and casings project will provide support to firearm examiners and to the National Integrated Ballistics Information Network (NIBIN) in the United States. The standard bullet is

Roundness Measurements Using the NIST Fiber Probe

January 1, 2007
Author(s)
Balasubramanian Muralikrishnan, Jack A. Stone Jr., John R. Stoup
We have described a fiber probe for dimensional measurement of micro-holes in the 2004 and 2006 ASPE annual meetings. In this abstract, we describe the adaptation of this probe for measuring roundness of tiny holes and knife edge apertures. In its current

Surface Metrology Algorithm Testing System

January 1, 2007
Author(s)
Son H. Bui, Theodore V. Vorburger
This paper presents the development of a Web-based surface metrology algorithm testing system. The system includes surface analysis tools and a surface texture specimen database for parameter evaluation and algorithm verification. The system runs from a

Testing and Monitoring E-Business Using the Event-Driven Test Scripting Language

January 1, 2007
Author(s)
Boonserm Kulvatunyou, J Durand, Jungyub Woo, M Martin
This paper addresses challenges associated with conformance and interoperability testing of today's e-business technologies and proposes a new approach that improves on existing, test scripting languages and operation modes. A test model and scripting are

Control of MEMS Nanopositioners With Nano-Scale Resolution

November 10, 2006
Author(s)
Jason J. Gorman, Yong Sik Kim, Nicholas Dagalakis
Several approaches for the precision control of micro-scale positioning mechanisms, or MEMS nanopositioners, are presented along with initial experimental results which demonstrate nano-scale positioning resolution. The MEMS nanopositioners discussed in

Design of an On-Chip Micro-Scale Nanoassembly System

November 3, 2006
Author(s)
Jason J. Gorman, Yong Sik Kim, Andras Vladar, Nicholas Dagalakis
In this paper, the design and proposed operation of a MEMS-based nanoassembly system is presented. The nanoassembly system is comprised of four nanomanipulators that can work independently or cooperatively. The design of the nanomanipulators will be

A Model of Deformable Rings for Interpretation of Wireless Capsule Endoscopic Videos

November 1, 2006
Author(s)
Piotr Szczypinski, Ram D. Sriram, Parupudi Sriram, Nageshwar Reddy
Wireless Capsule Endoscopy (WCE) provides a means to obtain a detailed video of the small intestine, not feasible with other endoscopic techniques. A single session with WCE may produce nearly 8 hours of video, which may take around one to two hours to

A Model-Driven Approach for Building OWL DL and OWL Full Ontologies

October 1, 2006
Author(s)
S Brockmans, R Colomb, P Haase, E Kendall, Evan K. Wallace, G Xie
This paper presents an approach for visually modeling OWL DL and OWL Full ontologies based on the well-established visual modeling language UML. We discuss a metamodel for OWL based on the Meta-Object Facility, an associated UML profile as visual syntax

Interprocess Communication in the Process Specification Language

October 1, 2006
Author(s)
Conrad E. Bock
Interprocess communication is ubiquitous in modern computing, appearing most commonly as inputs, outputs, and messaging. This paper formalizes interprocess communication based on the involvement of entities in a process, and how processes determine which

Notes on an Information Model for Production Rules

October 1, 2006
Author(s)
Peter O. Denno
Production rules are rules used in production systems, sometimes called production rule engines. Production rule engines are commonly used to implement expert systems. This report describes an information model for the exchange of production rules and for

Simulation Prototypes for Incident Management Training

October 1, 2006
Author(s)
Guodong Shao, Charles R. McLean
First responders and incident management personnel need better training resources to prepare for future disasters. Live training exercises while valuable are often very expensive to organize and conduct. Training using modeling, simulation, and gaming
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