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Displaying 426 - 450 of 1445

Advancing X-Ray Scattering Metrology Using Inverse Genetic Algorithms

July 7, 2016
Author(s)
Adam F. Hannon, Daniel F. Sunday, Donald A. Windover, Regis J. Kline
We compare the speed and effectiveness of two genetic optimization algorithms to the results of statistical sampling via a Markov Chain Monte Carlo algorithm to find which is the most robust method for determining real space structure in periodic gratings

Electron Enhanced Growth of Crystalline Gallium Nitride Thin Films at Room Temperature and 100 C Using Sequential Surface Reactions

July 1, 2016
Author(s)
Alexana Roshko, Jaclyn Sprenger, Andrew S. Cavanagh, Steven George, Huaxing Sun, Kathryn J. Wahl
Low energy electrons may provide mechanisms to enhance thin film growth at low temperatures. In this work, gallium nitride (GaN) films were deposited over areas of ~5 cm2 at room temperature and 100 C using electrons with a low energy of 50 eV from an

Transient thermometry and high-resolution analysis of filamentary resistive switches

June 28, 2016
Author(s)
Jonghan Kwon, Chao-Yang Chen, Abhishek Sharma, Andrea Fantini, Malgorzata Jurczak, James A. Bain, Yoosuf Picard, Marek Skowronski, Andrew Herzing
We present data on the filament size and temperature distribution in Hf0.82Al0.18Ox-based Resistive Random Access Memory (RRAM) devices obtained by transient thermometry and high- resolution transmission electron microscopy (HRTEM). The thermometry shows

Characterization of Buried Interfaces with Scanning Probe Microscopes

May 19, 2016
Author(s)
Joseph J. Kopanski, Lin You, Jungjoon Ahn, Yaw S. Obeng
Scanning probe microscopes (SPMs) have some capability to image sub-surface structure, including the details of buried interfaces. This paper describes the theoretical and practical basis for obtaining information about shallow buried interfaces

Low Frequency Radio Wave Detection of Electrically Active Defects in Dielectrics

May 19, 2016
Author(s)
Yaw S. Obeng, Chukwudi A. Okoro, Pavel Kabos, Rhonda R. Franklin, Papa K. Amoah
In this paper, we discuss the use of low frequency (up to 300 MHz) radio waves (RF) to detect and characterize electrical defects present in the dielectrics of emerging integrated circuit devices. As an illustration, the technique is used to monitor the

In-Situ Metrology to Characterize Water Vapor Delivery during Atomic Layer Deposition

May 2, 2016
Author(s)
Tariq Ahmido, William A. Kimes, Brent A. Sperling, Joseph T. Hodges, James E. Maslar
Water is often employed as the oxygen source in metal oxide atomic layer deposition (ALD) processes. It has been reported that variations in the amount of water delivered during metal oxide ALD can impact the oxide film properties. Hence, one contribution

A ROUND ROBIN EXPERIMENT TO SUPPORT BOND VOID MEASUREMENT STANDARDS

May 1, 2016
Author(s)
Richard A. Allen, David T. Read, Victor H. Vartanian, Winthrop A. Baylies, William Kerr, Mark Plemmons, Kevin T. Turner
A round robin experiment to compare the sensitivities of various metrology tools to small voids between bonded wafers such as are used in three-dimensional stacked integrated circuits (3DS-ICs) and MEMS packaging. Participants received a set of four bonded

Hardware Security Thorough Supply Chain Assurance

April 28, 2016
Author(s)
Yaw S. Obeng, David A. Brown, Colm Nolan
This paper examines the current issues pertaining to the hardware security and how they could affect the overall security of applications such as the internet of things. Specifically, we review the ongoing industry-led activities aimed at mitigating the

Rapid Fabrication of Poly(DL-lactide) Nanofiber Scaffolds with Tunable Degradation for Tissue Engineering Applications by Air-brushing

April 28, 2016
Author(s)
Adam M. Behrens, Jeffrey J. Kim, Nathan A. Hotaling, Jonathan Seppala, Peter Kofinas, Wojtek J. Tutak
Polymer nanofiber based materials have been widely investigated for use as tissue engineering scaffolds. While promising, these materials are typically fabricated through techniques that require significant time or cost. Here we report a cost effective

Optical Spintronics in Organic-Inorganic Perovskites Photovoltaics

April 25, 2016
Author(s)
Junwen Li, Paul M. Haney
Organic-inorganic halide CH 3NH 3PbI 3 solar cells have attracted enormous attention in recent years due to their remarkable power conversion efficiency. These materials should exhibit interesting spin-dependent properties as well, owing to the strong spin
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