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Talks

Defect depth profiling in gate dielectrics

Author(s)
Kin P. Cheung
Defects in gate dielectric greatly impact the performance and reliability of advanced MOSFETs. The introduction of high-k/metal gate technology makes the

Seeking Science and Technology

Author(s)
Stacy M. Bruss, Keith R. Martin
Although not everyone can be a sci-tech information specialist, science, technology, and medicine (STM) tends to overlap with other research agendas. This
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