Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Journals

Small Angle X-Ray Scattering for Sub-100 nm Pattern Characterization

Author(s)
Ronald L. Jones, T Hu, Eric K. Lin, Wen-Li Wu, R Kolb, D Casa, P J. Bolton, G G. Barclay
The characterization of sub-100 nm photolithographic patterns with nanometer scale resolution is demonstrated using Small Angle X-ray Scattering (SAXS). The...

Polymer-derived SiCN composites with magnetic properties

Author(s)
Atanu Saha, Sandeep R. Shah, Rishi Raj, Stephen E. Russek
Composites consisting of particles of α-iron dispersed in silicon carbonitride (SiCN) were fabricated by a polymer route. The composites had iron inclusions...

Elastic Constants of Layers in Isotropic Laminates

Author(s)
F Hayliger, H M. Ledbetter, Sudook A. Kim, Ivar E. Reimanis
We determined the individual laminae elastic constants in multilayer laminates composed of dissimilar isotropic layers using acoustic resonance spectroscopy and...

MatML: A Data Interchange Markup Language

Author(s)
J G. Kaufman, E F. Begley
This paper updates and expands upon previously published information on MatML, a new extensible markup language designed specifically for the exchange of...

Extinction Near-Field Optical Microscopy

Author(s)
H F. Hamann, M Larbadi, S Barzen, T Brown, Alan Gallagher, David Nesbitt
Two AFM-assisted, apertureless, optical-imaging methods are presented. These overcome the severe resolution consrtaints of aperture-based Near-field Scanning...

Facility for Pulsed Extreme Ultraviolet Detector Calibration

Author(s)
Steven E. Grantham, Robert E. Vest, Charles S. Tarrio, Thomas B. Lucatorto
All of the Extreme Ultraviolet light sources currently under consideration for Extreme Ultraviolet lithography are based on plasmas that emit radiation with a...
Was this page helpful?