Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Journals

Round-Robin Study of Arsenic Implant Dose Measurement in Silicon by SIMS

Author(s)
Richard M. Lindstrom, David S. Simons, R Bennett, R. Benbalagh, Bruce S. MacDonald, A. Chew, D. Gehre, H Hasegawa, C. Hitzman, J. Ko, C W. Magee, N. Montgomery, P. Peres, P. Ronsheim, S. Yoshikawa, M. Schuhmacher, W. Stockwell, D. Sykes, M. Tomita, F. Toujou, J. Won
Was this page helpful?