Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Precise Manipulation and Alignment of Single Nanowire

Published

Author(s)

Qiliang Li, Sang-Mo Koo, Curt A. Richter, Monica D. Edelstein, John E. Bonevich, Joseph Kopanski, John S. Suehle, Eric M. Vogel

Abstract

Nanowires and nanotubes are being intensively investigated for nanoelectronic transport applications. The integration of such nanostructures into circuitry requires a simple, high-efficiency and low-cost strategy. Here we develop a single nanowire manipulating system to precisely manipulate and align the nanowire individually. We show that a single nanowire can be picked up through electromechanical force, transferred over different substrates and placed onto a pre-defined location. In addition, we have developed compatible fabrication processes to pattern all the aligned nanowires using one-level optical mask alignment. Representative test structures and a simple silicon nanowire transistor have been fabricated and demonstrated based on this approach.
Citation
Nano Letters
Volume
6
Issue
2

Keywords

alignment, nanoelectronics, silicon nanowire, transistor

Citation

Li, Q. , Koo, S. , Richter, C. , Edelstein, M. , Bonevich, J. , Kopanski, J. , Suehle, J. and Vogel, E. (2007), Precise Manipulation and Alignment of Single Nanowire, Nano Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32233 (Accessed April 14, 2024)
Created March 1, 2007, Updated October 12, 2021