Precise Manipulation and Alignment of Single Nanowire
Qiliang Li, Sang-Mo Koo, Curt A. Richter, Monica D. Edelstein, John E. Bonevich, Joseph Kopanski, John S. Suehle, Eric M. Vogel
Nanowires and nanotubes are being intensively investigated for nanoelectronic transport applications. The integration of such nanostructures into circuitry requires a simple, high-efficiency and low-cost strategy. Here we develop a single nanowire manipulating system to precisely manipulate and align the nanowire individually. We show that a single nanowire can be picked up through electromechanical force, transferred over different substrates and placed onto a pre-defined location. In addition, we have developed compatible fabrication processes to pattern all the aligned nanowires using one-level optical mask alignment. Representative test structures and a simple silicon nanowire transistor have been fabricated and demonstrated based on this approach.
, Koo, S.
, Richter, C.
, Edelstein, M.
, Bonevich, J.
, Kopanski, J.
, Suehle, J.
and Vogel, E.
Precise Manipulation and Alignment of Single Nanowire, Nano Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32233
(Accessed September 26, 2023)