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Effect of line and trench profile variation on specular and diffuse reflectance from a periodic structure

Published

Author(s)

Thomas A. Germer
Citation
Journal of the Optical Society of America A-Optics Image Science and Vision
Volume
24
Issue
3

Citation

Germer, T. (2007), Effect of line and trench profile variation on specular and diffuse reflectance from a periodic structure, Journal of the Optical Society of America A-Optics Image Science and Vision (Accessed April 15, 2024)
Created March 1, 2007, Updated February 17, 2017