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Journals

IT Pro Conference on Information Systems Governance

Author(s)
Irena Bojanova, D. Richard Kuhn
Approximately 100 IT professionals participated in the 2014 IT Pro Conference on Information Systems Governance, held at the National Institute of Standards and...

In Search of Better Pressure Standards

Author(s)
Jay H. Hendricks, Jacob E. Ricker, Patrick F. Egan, Gregory F. Strouse
Based on highly accurate optical interferometry and fundamental quantum calculations, researchers at the National Institute of Standards and Technology (NIST)...

Development of an EUVL collector with infrared radiation suppression

Author(s)
Steven E. Grantham, Mike Kriese, Yuriy Platonov, Bodo Ehlers, Licai Jiang, Jim Rodriguez, Mueller Ulrich, Shayna khatri, Adam Magruder, Charles S. Tarrio
Laser-produced plasma (LPP) sources for extreme ultraviolet lithography (EUVL) systems utilize CO2 lasers operating with wavelength 10.6μm. Since multilayer...

Improved measurement capabilities at the NIST EUV Reflectometry Facility

Author(s)
Charles S. Tarrio, Steven E. Grantham, Thomas A. Germer, Jack C. Rife, Thomas B. Lucatorto, Mike Kriese, Yuriy Platonov, Licai Jiang, Jim Rodriguez
The NIST Extreme Ultraviolet (EUV) Reflectometry Facility was designed in the 1990s to accommodate the largest multilayer optics envisioned at that time...

Phase Transitions and Magnetocaloric Effect in Mn3Cu0.89Nd0.96^

Author(s)
Jun Yan, Ying Sun, Hui Wu, Qingzhen Huang, Cong Wang, Zaixing Shi, Sihao Deng, Kewen Shi, Huiqing Lu, Lihua Chu
We report the large magnetic entropy change observed in the antiperovskite Mn 3Cu 0.89N 0.96. Based in the heat flow peak measured by differential scanning...

Elliptic Curves arising from Brahmagupta Quadrilaterals

Author(s)
Farzali Izadi, Foad Khoshnam, Dustin Moody, Arman Zargar
A Brahmagupta quadrilateral is a cyclic quadrilateral whose sides, diagonals, and area are all integer values. In this article, we characterize the notions of...

Characterization of Buried Structure in Directed Self Assembly Block Copolymers

Author(s)
Daniel F. Sunday, Matthew R. Hammond, Chengqing C. Wang, Wen-Li Wu, Dean M. DeLongchamp, Regis J. Kline, Melia Tjio, Joy Cheng, Jed W. Pitera
The directed self assembly (DSA) of block copolymers (BCP) can multiply or subdivide the pitch of a lithographically defined chemical or topological pattern and...
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