Conferences

Angular Response Characteristics of Ellipsoidal Radiometers

January 1, 2003

Author(s)

A V. Murthy, D P. DeWitt, Gerald T. Fraser

Modeling, Measurement, and Standards for Wafer Inspection, Government Microcircuits Applications and Critical Technologies

January 1, 2003

Author(s)

G W. Mulholland, Thomas Germer, J C. Stover

Lightpipe Proximity Effects on Si Wafer Temperature in Rapid Thermal Processing Tools

January 1, 2003

Author(s)

K G. Kreider, D H. Chen, D P. DeWitt, W A. Kimes, Benjamin K. Tsai

Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools

January 1, 2003

Author(s)

K G. Kreider, D H. Chen, W A. Kimes, D P. DeWitt, Benjamin K. Tsai

Rotational Spectra of Chemical Agents and Simulants Using Fourier-Transform Microwave Spectroscopy, ed. by D.A. Berg, U.S. Army Soldier Biological Chemical Command, MD

January 1, 2003

Author(s)

R S. DaBell, R D. Suenram, J O. Jensen, A C. Samuels

Coupling Efficiencies in Single Photon On-Demand Sources

January 1, 2003

Author(s)

Stefania Castelletto, Ivo P. Degiovanni, M J. Ware, Alan L. Migdall

Microsecond Time-Resolved Pyrometry During Rapid Resistive Heating of Samples in a Kolsky Bar Apparatus, ed. by D. Ripple

January 1, 2003

Author(s)

D Basak, Howard Yoon, R Rhorer, T J. Burns

Temperature Control of Pulse Heated Specimens in a Kolsky Bar Apparatus Using Microsecond Time-Resolved Pyrometry

January 1, 2003

Author(s)

D Basak, Howard Yoon, R Rhorer, T J. Burns, T Matsumoto

Improving Neutron Source Calibrations at the National Institute of Standards and Technology

January 1, 2003

Author(s)

J M. Adams, David M. Gilliam

The Local Structure of Antimony in High Dose Antimony Implants in Silicon by XAFS and SIMS

January 1, 2003

Author(s)

M A. Sahiner, S W. Novak, Joseph Woicik, Y. Takamura, P B. Griffin, J D. Plummer

One of the important challenges in semiconductor industry is to sustain high concentration of dopant atoms electronically active in very small areas. In

Enhancing Sensitivity of Atomic Force Microscopy for Characterizing Surface Chemical Heterogeneity

January 1, 2003

Author(s)

Xiaohong Gu, Mark R. VanLandingham, Michael J. Fasolka, Jonathan W. Martin, J Y. Jean, Tinh Nguyen

Combinatorial Methods Study of Confinement Effects on the Reaction Front in Ultrathin Chemically Amplified Photoresists

January 1, 2003

Author(s)

M Wang, Eric K. Lin, Alamgir Karim, Michael J. Fasolka

Structural Characterization of Methylsilsesquioxane-Based Porous Low-k using X-ray Porosimetry

January 1, 2003

Author(s)

V. J. Lee, Christopher Soles, D W. Liu, Barry J. Bauer, Eric K. Lin, Wen-Li Wu

Uncertainty Budgets for Realization of ITS-90 by Radiation Thermometry

January 1, 2003

Author(s)

J Fischer, M Battuello, M Sadli, M Ballico, S N. Park, P Saunders, Y Zundong, B. Carol Johnson, E Van der Ham, F Sakuma, Graham Machin, N Fox, W Li, S Ugur, M Matveyev

Recent international comparisons [1,2] and key comparisons have shown that the realization of the ITS-90 above the freezing point of silver and its

Isochoric Heat Capacities of Ethanol-Water Mixtures at Temperatures from 280 K to 420 K and Pressures to 30 MPa

January 1, 2003

Author(s)

Hiroshi Kitajima, Noboru Kagawa, Harumi Endo, Seizo Tsuruno, Joe W. Magee

Specific heat capacity at constant volume is one of the most important thermodynamic properties to develop and evaluate thermodynamic equations of state. With

Specific Isochoric Heat Capacity Measurements for Liquid Isobutane

January 1, 2003

Author(s)

Hiroyuki Miyamoto, Hiroshi Kitajima, Noboru Kagawa, Joe W. Magee, Seizo Tsuruno, Koichi Watanabe

Experimental specific isochoric heat capacities (C v) and PρT properties for isobutane are presented that were measured with a twin-cell type adiabatic

A 193 nm Detector Nonlinearity Measurement System at NIST

January 1, 2003

Author(s)

Shao Yang, Darryl A. Keenan, Holger Laabs, Marla L. Dowell

To meet the semiconductor industry's demands for accurate measurements on excimer lasers, we have developed a system using the correlation method to measure the

Trace Water Detection in Phosphine by Cavity Ring-down Spectroscopy

January 1, 2003

Author(s)

Susan Y. Lehman, Kristine A. Bertness, Joseph T. Hodges

We are using cavity ring-down spectroscopy (CRDS) to measure concentrations of water in nitrogen and, for the first time to our knowledge, in phosphine. Water

Investigation of the Shape of InGaAs/GaAs Quantum Dots

January 1, 2003

Author(s)

Susan Y. Lehman, Alexana Roshko, Richard Mirin, John E. Bonevich

Three samples of self-assembled In 0.44Ga 0.56As quantum dots (QDs) grown on (001) GaAs by molecular beam epitaxy (MBE) were studied using atomic force

A 193 nm Laser Detector Nonlinearity Measurement System

January 1, 2003

Author(s)

Darryl A. Keenan, Holger Laabs, Shao Yang, Marla L. Dowell

To meet the semiconductor industry's demands for accurate measurements, we have developed a method to characterize the nonlinear response of 193 nm excimer

Measurements of the Refractive Indices of MOCVD and HVPE Grown AlGAN Films Using Prism-Coupling Techniques Correlated With Spectroscopic Reflection/Transmission Analysis

January 1, 2003

Author(s)

Norman Sanford, Larry Robins, Albert Davydov, Alexander J. Shapiro, Denis V. Tsvetkov, Vladimir A. Dmitriev, Stacia Keller, Umesh Mishra, Steven P. DenBaars

Waveguide prism-coupling methods were used to measure the ordinary and extraordinary refractive indices of Al xGaN films grown on sapphire substrates by HVPE

Mode-Locked and Single-Frequency Er/Yb Co-Doped Waveguide Lasers

January 1, 2003

Author(s)

John B. Schlager, Berton Callicoatt, Richard Mirin, Norman Sanford

Erbium/ytterbium co-doped planar waveguide lasers are fabricated for low-jitter mode-locked operation and single-frequency operation at 1.54 υm. The passively

Low-Electron-Energy Cathodoluminescence Study of Polishing and Etching Effects on the Optical Properties of Bulk Single-Crystal Gallium Nitride

January 1, 2003

Author(s)

Larry Robins, B. Steiner, Norman Sanford, Carmen Menoni

Low electron energy cathodoluminescence (LEECL) was used to examine polishing-induced damage in a bulk high-pressure grown GaN single-crystal platelet. The Ga

Advanced Test and Calibration Systems for Integrated Multi-Sensor Platforms with IR, Visible, and Laser Range Finder/Designator Capabilities

January 1, 2003

Author(s)

Paul Bryant, Jack Grigor, Pat Harris, Brian Rich, Alan Irwin, Steve McHugh, Daniel W. King, Rodney Leonhardt

This paper discusses recent advances in the development of test and evaluation instrumentation for military laser range finder (LRF) and designation systems

Detection of Trace Water in Phosphine with Cavity Ring-down Spectroscopy

January 1, 2003

Author(s)

Susan Y. Lehman, Kristine A. Bertness, Joseph T. Hodges

Water is a detrimental impurity even at concentrations of 10 nmol/mol or less in source gases for compound semiconductor epitaxial growth. Oxygen complexes from

Broadband Characterization of Optoelectronic Components to 65 GHz Using VNA Techniques

January 1, 2003

Author(s)

M M. Maska, Jon Martens, Tracy S. Clement, Paul D. Hale, Dylan Williams

This paper discusses the typical uncertainties associated with characterizing high speed photodiodes to 65 GHz when using a vector network analyzer measurement

Surface finish effects on partial discharge with embedded electrodes

January 1, 2003

Author(s)

Aleta T. Wilder, Robert E. Hebner, Yicheng Wang

Partial discharge measurements have been used to characterize the response of dielectric insulation materials exposed to ac voltages. Electrode surface finish

DIVERSE: A Framework for Building Extensible and Reconfigurable Device Independent Virtual Environments

December 31, 2002

Author(s)

John T. Kelso, L E. Arsenault, Steven G. Satterfield, R D. Kriz

We present DIVERSE, a highly modular collection of complementary software packages designed to facilitate the creation of device independent virtual

Distributed Testing of an Equipment-Level Interface Specification

December 31, 2002

Author(s)

Joseph Falco, John A. Horst, Hui-Min Huang, Thomas Kramer, Frederick M. Proctor, Keith A. Stouffer, Albert J. Wavering

A test suite for an key interface within a dimensional measuring system (coordinate measuring machine or CMM) is presented. The test suite consists of test

Impact of Metrology on the Economy and Quality of Life

December 16, 2002

Author(s)

Hratch G. Semerjian, Ellyn S. Beary