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Conferences

NEXAFS Measurements of the Surface Chemistry of Chemically Amplified Photoresists

September 1, 2003

Author(s)

E Jablonski, M Angelopoulos, H Ito, Joseph~undefined~undefined~undefined~undefined~undefined Lenhart, S Sambasivan, Daniel A. Fischer, Ronald L. Jones, Eric K. Lin, Wen-Li Wu, D L. Goldfarb, K Temple

Near edge x-ray absorption fine structure (NEXAFS) spectroscopy was used to quantify the surface composition profile (top 1 nm to 6 nm) of model chemically...

Spectral Radiance Comparisons of Two Blackbodies with Temperatures Determined Using Absolute Detectors and ITS-90 Techniques

September 1, 2003

Author(s)

Howard W. Yoon, Charles E. Gibson, J L. Gardner

For calibrations of spectral irradiance standards, a high-temperature blackbody (HTBB) is used as a source of spectral radiance or irradiance as derived from...

The Development and Characterization of an Absolute Pyrometer Calibrated for Radiance Responsivity

September 1, 2003

Author(s)

David W. Allen, Robert D. Saunders, Bettye C. Johnson, Charles E. Gibson, Howard W. Yoon

The International Temperature Scale of 1990 (ITS-90), for temperatures above the freezing temperature of silver, is defined with pyrometers which rely upon...

Characterization and Calibration of Lightpipe Radiation Thermometers for Use in Rapid Thermal Processing

September 1, 2003

Author(s)

Benjamin K. Tsai, D P. DeWitt

Lightpipe radiation thermometers (LPRTs) are the sensor of choice for temperature measurements in Rapid Thermal Processing (RTP) applications. At the National...

Techniques for Primary Acoustic Thermometry to 800 K

September 1, 2003

Author(s)

Dean C. Ripple, Dana R. Defibaugh, Michael R. Moldover, Gregory F. Strouse

The NIST Primary Acoustic Thermometer will measure the difference between the International TemperatureScale of 1990 and the Kelvin Thermodynamic Scale...

Monitoring Sheath Voltages and Ion Energies in High-Density Plasmas Using Noninvasive Radio-Frequency Current and Voltage Measurements

September 1, 2003

Author(s)

Mark A. Sobolewski

To obtain optimal results from plasma processing, the energy of ions incident on substrate wafers must be carefully controlled. Such control has been difficult...

In Situ Optical Diagnostics of Silicon Chemical Vapor Deposition Gas-Phase Processes

September 1, 2003

Author(s)

James E. Maslar, Wilbur S. Hurst

During silicon thermal chemical vapor deposition, reactions occurring in the gas phase above the wafer surface can strongly influence the deposited film quality...

Progress in Primary Acoustic Thermometry at NIST: 273 K to 505 K

September 1, 2003

Author(s)

Gregory F. Strouse, Dana R. Defibaugh, Michael R. Moldover, Dean C. Ripple

The NIST Acoustic Thermometer determines the thermodynamic temperature by measuring the speed of sound of argon in a spherical cavity. We obtained the...

Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools

September 1, 2003

Author(s)

Kenneth G. Kreider, D H. Chen, D P. DeWitt, William A. Kimes, Benjamin K. Tsai

curate temperature measurements are critical in rapid thermal processing (RTP) of silicon wafers for thermal oxidation and dopant anneals. Many RTP tools use...

Effects of Lightpipe Proximity on Si Wafer Temperature in Rapid Thermal Processing Tools

September 1, 2003

Author(s)

Kenneth G. Kreider, D H. Chen, D P. DeWitt, William A. Kimes, Benjamin K. Tsai

Lightpipe radiation thermometers (LPRTs) are the preferred temperature monitoring sensor in most rapid thermal processing (RTP) tools for semiconductor...

Determination of Factors Affecting HRTEM Gate Dielectric Thickness Measurement Uncertainty

September 1, 2003

Author(s)

J H. Scott

Because high-resolution transmission electron microscopy (HRTEM) relies on a complex contrast mechanism to produce images of gate dielectric films in cross...

An Open Standard for Chemical Structure Representation: The IUPAC Chemical Identifier

September 1, 2003

Author(s)

Stephen E. Stein, Stephen R. Heller, Dmitrii V. Tchekhovskoi

IUPAC has long been involved in the development of systematic and standard procedures for naming chemical substances on the basis of their structure. The...

Evaluation of One- and Two-Sided Geometric Fitting Algorithms in Industrial Software

September 1, 2003

Author(s)

Craig M. Shakarji

Recent work in testing and comparing maximum-inscribed, minimum-circumscribed, and minimum-zone (Chebyshev) fitting algorithms indicates that serious problems...

Knowledge Intensive Collaborative Decision Support for Design Process

September 1, 2003

Author(s)

XuanFang Zha, Ram D. Sriram, W F. Lu

Engineering design is essentially a collaborative decision making process that requires rigorous evaluation, comparison and selection of design alternatives and...

Intelligent Systems for Urban Search and Rescue: Challenges and Lessons Learned

September 1, 2003

Author(s)

Adam S. Jacoff, Elena R. Messina, Brian A. Weiss

Urban search and rescue (USAR) is one of the most dangerous and time-critical non-wartime activities. Researchers have been developing hardware and software to...

Multiple wavelength reference based on interleaved, sampled fiber gratings and molecular absorption

September 1, 2003

Author(s)

Mary A. Rowe, William C. Swann, Sarah L. Gilbert

We present a wavelength calibration reference based on sampled fiber gratings stabilized to a molecular absorption line. Such a hybrid reference can provide...

Development of Metrology at NIST For the Semiconductor Industry

September 1, 2003

Author(s)

Stephen Knight

The National Institute of Standards and Technology metrology development for the semiconductor industry and its supporting infrastructure is a broad set of...

The IPC-2252, Design Guide for RF/Microwave Circuit Boards

September 1, 2003

Author(s)

Nicholas G. Paulter Jr.

The IPC-2252,'Design Guide for RF/Microwave Circuit Boards,'[1] (superceding the IPC-D-316) was published in July 2002. The IPC-2252 provides information...

NIST Calibration Uncertainties of Liquid-in-Glass Thermometers over the Range from 20 C to 400 C

September 1, 2003

Author(s)

C D. Vaughn, Gregory F. Strouse

The NIST Industrial Thermometer Calibration Laboratory (ITCL) is responsible for calibrating several different types of industrial thermometers. One of those...

Determination of Pore-Size Distributions in Low-Κ Dielectric Films by Transmission Electron Microscopy

September 1, 2003

Author(s)

B J. Foran, B Kastenmeier, David S. Bright

This paper discusses methods of characterizing pore size distributions in low-k films by transmission electron microscopy (TEM), comparing both conventional TEM...

Temperature Metrology and Its Impact on Industry

September 1, 2003

Author(s)

Hratch G. Semerjian, Ellyn S. Beary

Temperature measurement represents one of the most frequently and broadly used measurements, with a majority of products manufactured having temperature...

Temperature and Flux Scales for Heat-Flux Sensor Calibration

September 1, 2003

Author(s)

A V. Murthy, D P. DeWitt, Benjamin K. Tsai, Gerald T. Fraser, Robert D. Saunders

Methodologies for calibrating heat-flux sensors designed for direct measurement of heat-transfer at a surface are presented. These sensors, extensively used in...

Ground Truth and Benchmarks for Performance Evaluation

September 1, 2003

Author(s)

A Takeucki, Michael O. Shneier, Tsai H. Hong, Tommy Chang, Christopher J. Scrapper Jr, Geraldine Cheok

Stability of fiber Bragg grating wavelength calibration references

September 1, 2003

Author(s)

Shellee D. Dyer, Jonathan D. Kofler, Robert J. Espejo, Shelley M. Etzel

We discuss the key considerations necessary to create stable fiber Bragg grating (FBG) wavelength references. We describe two high-accuracy measurements to...

Generating quiet continua: noise limitations to supercontinuum generation in photonic crystal fiber

September 1, 2003

Author(s)

J M. Dudley, S. Coen, Nathan R. Newbury, Kristan L. Corwin, Scott Diddams, Brian Washburn, R Windeler

SC generation in photonic crystal fiber can be associated with intensity fluctuations arising from the nonlinear amplification of input pulse noise. Experiments...

Active millimeter-wave imaging for concealed weapons detection

September 1, 2003

Author(s)

Erich N. Grossman, Aaron J. Miller

Actively illuminated mm-wave imaging systems for concealed weapons detection offer the possibility of much higher sensitivity than with passive systems. We...

Temperature Scales Using Radiation Thermometers Calibratied From Absolute Irradiance and Radiance Responsivity

August 21, 2003

Author(s)

Howard W. Yoon, David W. Allen, Charles E. Gibson, Robert D. Saunders, Bettye C. Johnson, Steven W. Brown, Keith R. Lykke

In the International Temperature Scale of 1990 (ITS-90), temperatures above the freezing temperature of silver are defined with radiation thermometers...

A Bridge for Scaling to Higher Resistance from the QHR

August 21, 2003

Author(s)

Randolph Elmquist, Dean G. Jarrett

A two-terminal bridge for resistance scaling directly from the quantum Hall resistance (QHR) to higher-resistance values now provides a secondary starting point...

Expanding the Role of Finite State Machine Technology in Open Architecture Control

August 21, 2003

Author(s)

John L. Michaloski, Frederick M. Proctor, William G. Rippey, S Kolla

Modern machine control systems rely heavily on software to achieve system functionality. Until recently, control software?s primary purpose was to provide logic...

Changes and Improvements in the 10 k-ohm Special Calibration Service

August 21, 2003

Author(s)

George R. Jones Jr., Marlin E. Kraft, Randolph Elmquist

The 1(ohm) level of resistance has been the source of the lowest standard uncertainties for d.c. resistance calibrations. At the 10 k(ohm) level, equally good...

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