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Conferences

Nano- and Atomic-Scale Length Metrology

Author(s)
Theodore V. Vorburger, Ronald G. Dixson, Joseph Fu, Ndubuisi George Orji, Shaw C. Feng, Michael W. Cresswell, Richard A. Allen, William F. Guthrie, Wei Chu
We discuss nano-scale length metrology of linewidth, step height, and line edge roughness (LER). These properties are of growing importance to the function and

Topography Measurements and Applications

Author(s)
Jun-Feng Song, Theodore V. Vorburger
Based on auto- and cross-correlation functions (ACF and CCF), a new surface parameter called profile (or topography) difference, Ds, has been developed for

A Measurement-Based Multisine Design Procedure

Author(s)
M. Myslinski, Kate Remley, Michael McKinley, Dominique Schreurs, Bart Nauwelaers
This work presents a procedure to design a multisine with probability density function (PDF) similar to that of a measured realistic digitally modulated signal

Force Calibration Via Electrostatics

Author(s)
Jon R. Pratt, John A. Kramar, Gordon A. Shaw, Lee Kumanchik
We describe the electrical and length measurements necessary to realize micronewton forces in a fashion consistent with the International System of Units (SI)
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