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Deposition and Measurement of Nanoscale Complex Hydrocarbon Films on Magnetic Hard Disk Surfaces
Published
Author(s)
Richard S. Gates, Selda Gunsel, Stephen M. Hsu
Abstract
Measurement of complex hydrocarbon film thickness on engineering surfaces such as magnetic hard disks is difficult if the film thickness is below the peak to valley distance of the surface. Instrument sensitivity and detection accuracy for most of the common tools for this purpose is limited. We have developed a novel calibration technique that allows accurate measurement of such films within 5% - 10% accuracy.(extended abstract attached)
Gates, R.
, Gunsel, S.
and Hsu, S.
(2005),
Deposition and Measurement of Nanoscale Complex Hydrocarbon Films on Magnetic Hard Disk Surfaces, Proceedings| ASME| 2005
(Accessed December 10, 2023)