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Conferences

The Limits of Image-Based Optical Metrology

March 1, 2006

Author(s)

Richard M. Silver, Bryan M. Barnes, Ravikiran Attota, Jay S. Jun, James J. Filliben, Juan Soto, Michael T. Stocker, P Lipscomb, Egon Marx, Heather J. Patrick, Ronald G. Dixson, Robert D. Larrabee

An overview of the challenges encountered in imaging device-sized features using optical techniques recently developed in our laboratories is presented in this...

Progress on Implementation of a CD-AFM Based Reference Measurement System

March 1, 2006

Author(s)

Ndubuisi G. Orji, Angela Martinez, Ronald G. Dixson, J Allgair

The National Institute of Standards and Technology (NIST) and SEMATECH are working to address traceability issues in semiconductor dimensional metrology. In...

Perceptual Study of the Impact of Varying Frame Rate on Motion Imagery Interpretability

March 1, 2006

Author(s)

Charles D. Fenimore, J Irvine, D Cannon, John W. Roberts, A Aviles, S Israel, Michelle Brennan, L Simon, J Miller, Donna Haverkamp, P F. Tighe, Michael Gross

The development of a motion imagery (MI) quality scale, akin to the National Image Interpretibility Rating Scale (NIIRS) for still imagery, would have great...

The Deprotection Reaction Front Profile for Model 193 nm Methacrylate-Based Chemically Amplified Photoresists

March 1, 2006

Author(s)

B D. Vogt, Shuhui Kang, Vivek Prabhu, Ashwin Rao, Eric K. Lin, Sushil K. Satija, Karen Turnquest, Wen-Li Wu

An understanding of acid diffusion-reaction in chemically amplified photoresists during the post-exposure bake (PEB) is critical for both critical dimension (CD...

Fundamentals of the Reaction-Diffusion Process in Model EUV Photoresists

March 1, 2006

Author(s)

Kristopher Lavery, George Thompson, Hai Deng, D S. Fryer, Kwang-Woo Choi, B D. Vogt, Vivek Prabhu, Eric K. Lin, Wen-Li Wu, Sushil K. Satija, Michael Leeson, Heidi B. Cao

More demanding requirements are being made of photoresist materials for fabrication of nanostructures as the feature critical dimensions (CD) decrease. For EUV...

Improved Thermal Detector Coatings for Laser Radiometry at NIST

February 27, 2006

Author(s)

John H. Lehman

Nearly all of the radiometric standards for laser power and energy measurements at NIST and elsewhere in the world are based on thermal detectors. These...

The Next Generation of Laser Radiometry at NIST

February 27, 2006

Author(s)

John H. Lehman, Christopher L. Cromer, Marla L. Dowell

High accuracy laser radiometry is on the verge of significant improvements just as new laser technologies are evolving. Our present tasks are directed toward...

Characterizing reliability of multilayer PZT actuators

February 26, 2006

Author(s)

Stephanie A. Hooker

Many new applications are emerging for piezoelectric ceramics including adaptive structures, active-flow-control devices, and vibration and noise suppression...

Reliability of ultra-thin insulation coatings for long-term electrophysiological recordings

February 26, 2006

Author(s)

Stephanie A. Hooker

Improved measurement of neural signals is needed for research into Alzheimer¿s, Parkinson¿s, epilepsy, strokes, and spinal cord injuries. At the heart of such...

Cross-Display-Technology Video Motion Measurement Tools

February 23, 2006

Author(s)

John W. Roberts, Edward A. Fanning, Hassan A. Sahibzada

High performance video places severe demands on playback system and display device resources. Motion playback errors such as irregular motion playback and image...

Estimation of the Interfacial Adhesion Strength in Compositional Libraries of Epoxy Films

February 22, 2006

Author(s)

Jae Hyun Kim, Martin Y. Chiang, D Kawaguchi, Gareth Royston, Christopher M. Stafford

At the NIST Combinatorial Methods Center (NCMC), we have designed, developed, and demonstrated a combinatorial approach to the edge delamination test to char...

Chemorheological Studies on the Environmental Susceptibility of a Model System for Adhesives and Sealants

February 19, 2006

Author(s)

Kar T. Tan, David J. Benatti, Christopher C. White, Donald L. Hunston

The degradation of styrene-butadiene-styrene triblock copolymer has been characterized using DMTA, FTIR-transmission and UV-Vis spectroscopies. From FTIR...

Dissolution Fundamentals of 193-nm Methacrylate Based Photoresists

February 19, 2006

Author(s)

Ashwin Rao, Shuhui Kang, B D. Vogt, Vivek Prabhu, Eric K. Lin, Wen-Li Wu, Karen Turnquest, W D. Hinsberg

The dissolution of partially deprotected chemically amplified photoresists is the final step in printing lithographic features. Since this process step can be...

Copolymer Fraction Effect on Acid Catalyzed Deprotection Reaction Kinetics in Model 193 nm Photoresists

February 19, 2006

Author(s)

Shuhui Kang, Vivek Prabhu, B D. Vogt, Eric K. Lin, Wen-Li Wu, Karen Turnquest

A correlation between polymer molecular structure and acid catalyzed kinetics is demonstrated by a binary copolymer photoresists system which includes an acid...

Intelligent Control and Tactical Behavior Development: A Long Term NIST Partnership With the Army

February 16, 2006

Author(s)

James S. Albus, Anthony J. Barbera

For more than 15 years, the Intelligent Systems Division of the National Institute of Standards and Technology (NIST) has worked closely with the Army Research...

Terahertz circular variable filters

February 15, 2006

Author(s)

Erich N. Grossman, Charles Dietlein, A. Luukanen

We describe a novel class of millimeter-wave and terahertz monochrometers based on adiabatically tuned frequency-selective surfaces. They are analogous to the...

Phenomenology of Passive Broadband Terahertz Images

February 15, 2006

Author(s)

Charles Dietlein, A. Luukanen, Francois Meyer, Zoya Popovic, Erich N. Grossman

Images acquired by a 105-mK noise equivalent temperature difference (NETD) scanned single-pixel broadband 0.1-1 THz passive system are analyzed with two...

Boundary Error Analysis and Categorization in the TRECVID News Story Segmentation Task

February 13, 2006

Author(s)

Joaquim F. Arlandis, Paul D. Over, Wessel Kraaij

In this paper, an error analysis based on boundary error popularity including semantic boundary categorization is applied in the context of the news story...

Optical Metrology for LEDs and Solid State Lighting

February 9, 2006

Author(s)

Yoshi Ohno

The performance of Light Emitting Diodes (LEDs), including efficiency, flux level, lifetime, and the variation of color, is advancing at a remarkable pace. LEDs...

Investigation of Source Detection Algorithms for Gross Counting Portal Monitors

February 8, 2006

Author(s)

C G. Wahl, D J. Alderson, Leticia S. Pibida

In recent years, heightened security concerns have prompted increased interest in radiation portal monitors, instruments capable of detecting, and in some cases...

Development of a Color Quality Scale

February 8, 2006

Author(s)

Wendy L. Davis, Yoshihiro Ohno

A new metric for evaluating the color quality of light sources is being developed at NIST, in close contact with the lighting industry and the CIE. The current...

An Implementation of the Proposed IEEE 1451.0 and 1451.5 Standards

February 7, 2006

Author(s)

Eugene Song, Kang B. Lee

This Paper describes an implementation of the proposed IEEE 1451.0 and 1451.5 Standards. The implemented systsem was developed based on the object-oriented...

NIST Support of Phasor Measurements to Increase Reliability of the North American Electric Power Grid

February 6, 2006

Author(s)

Gerard N. Stenbakken, Thomas L. Nelson

The importance of developing better tools for observing the status of the North American Power Grid is described. Focus is on the performance of the Phase...

Compilation of Wavelengths and Energy Levels of Tungsten, W III Through W LXXIV

February 1, 2006

Author(s)

Alexander Kramida, T Shirai

The methods used to critically evaluate and compile the data on energy levels, wavelengths, and ionization potentials of multiply ionized tungsten and other...

Comparison of scanning capacitance microscopy and scanning Kelvin probe microscopy in determining two-dimensional doping profiles of Si homostructures

February 1, 2006

Author(s)

Seong-Eun Park, Nhan V. Nguyen, Joseph J. Kopanski, John S. Suehle, Eric M. Vogel

Two-dimensional (2-D) doping profiles of differently doped Si homostructures were investigated by scanning capacitance microscopy (SCM) and scanning Kelvin...

The development of procedures for impact testing

February 1, 2006

Author(s)

Thomas A. Siewert, Christopher N. McCowan

This report provides a broad overview of the progress in procedural improvements for impact testing. It includes a short summary of early developments, a...

High spatial resolution measurements of transverse stress in a fiber Bragg grating using four-state analysis low-coherence interferometry and layer-peeling

February 1, 2006

Author(s)

Robert J. Espejo, Shellee D. Dyer

Fiber Bragg grating (FBG) sensors have been shown to be a good means of non-destructive monitoring of the stress and/or strain of the materials in which they...

Overview of the First Advanced Technology Evaluations for ASSIST

January 31, 2006

Author(s)

Craig I. Schlenoff, Brian A. Weiss, Michelle P. Steves, Ann M. Virts, Michael O. Shneier, Michael Linegang

ASSIST (Advanced Soldier Sensor Information Systems Technology) is a DARPA-funded effort whose goal is to exploit soldier-worn sensors to augment the soldier s...

USARSim: Providing a Framework for Multi-Robot Performance Evaluation

January 31, 2006

Author(s)

Stephen B. Balakirsky, Christopher J. Scrapper Jr, Stefano Carpin, M L. Lewis

Research efforts in urban search and rescue robotics have grown substantially in recent years. Two important robotic competitions (a robot physical league and a...

High Sensitivity Measurements of the Scattering Dispersion of Phantoms using Spectral Domain Optical Coherence Tomography

January 26, 2006

Author(s)

Shellee D. Dyer, Tasshi Dennis, Paul A. Williams, Lara Roberson, Shelley M. Etzel, Robert J. Espejo, Thomas Germer, T E. Milner

We demonstrate a novel technique to determine the size of Mie scatterers with high sensitivity. Our technique is based on spectral domain optical coherence...

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