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Conferences

Deep Learning for MPC Extraction and False Detection

Author(s)
Howard Dai, Jack Chuang, Jian Wang, Samuel Berweger, David Griffith
Multipath component (MPC) extraction is critical for channel modeling and joint communications and sensing (JCAS). The super-resolution algorithm known as CLEAN...

Towards an Understanding of Robotic Bin-Picking Throughput

Author(s)
Anirudh Krishnan Komaralingam, Prem Rachakonda, Kamel Saidi, Armin Khatoonabadi
NIST is leading and supporting multiple efforts to develop standards for 3D imaging systems used for industrial automation. There are few standards for...

The SIM Time Network - Twenty Years of Operation

Author(s)
Andrew Novick, Jose Mauricio López Romero
The SIM Time Network (SIMTN) was established two decades ago to provide real-time time and frequency comparisons among National Metrology Institutes (NMIs)...

Ellipsometry in the EUV Regime

Author(s)
Aaron Chew, Bryan Barnes, Eric Shirley, Thomas Germer
We propose and analyze the sensitivity of an ellipsometer that uses extreme ultraviolet (EUV) light from the synchrotron SURF-III. The ellipsometer employs a...

Lab-based multi-wavelength EUV diffractometry for critical dimension metrology

Author(s)
Bryan Barnes, Aaron Chew, Nicholas Jenkins, Yunzhe Shao, Martin Sohn, Regis Kline, Daniel Sunday, Purnima Balakrishnan, Thomas Germer, Steven Grantham, Clay Klein, Stephanie Moffitt, Eric Shirley, Henry Kapteyn, MARGARET MURNANE
Background: The industry is developing extreme-ultraviolet wavelength (EUV) techniques to measure critical dimensions (CDs) in logic fabrication. As nascent...
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