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Conferences

Towards an Understanding of Robotic Bin-Picking Throughput

Author(s)
Anirudh Krishnan Komaralingam, Prem Rachakonda, Kamel Saidi, Armin Khatoonabadi
NIST is leading and supporting multiple efforts to develop standards for 3D imaging systems used for industrial automation. There are few standards for

The SIM Time Network - Twenty Years of Operation

Author(s)
Andrew Novick, Jose Mauricio López Romero
The SIM Time Network (SIMTN) was established two decades ago to provide real-time time and frequency comparisons among National Metrology Institutes (NMIs)

Lab-based multi-wavelength EUV diffractometry for critical dimension metrology

Author(s)
Bryan Barnes, Aaron Chew, Nicholas Jenkins, Yunzhe Shao, Martin Sohn, Regis Kline, Daniel Sunday, Purnima Balakrishnan, Thomas Germer, Steven Grantham, Clay Klein, Stephanie Moffitt, Eric Shirley, Henry Kapteyn, MARGARET MURNANE
Background: The industry is developing extreme-ultraviolet wavelength (EUV) techniques to measure critical dimensions (CDs) in logic fabrication. As nascent

Ellipsometry in the EUV Regime

Author(s)
Aaron Chew, Bryan Barnes, Eric Shirley, Thomas Germer
We propose and analyze the sensitivity of an ellipsometer that uses extreme ultraviolet (EUV) light from the synchrotron SURF-III. The ellipsometer employs a

Data Frequency Coverage Impact on AI Performance

Author(s)
Erin Lanus, Brian Lee, Jaganmohan Chandrasekaran, Laura Freeman, M S Raunak, Raghu Kacker, David Kuhn
Artificial Intelligence (AI) models use statistical learning over data to solve complex problems for which straightforward rules or algorithms may be difficult
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