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Conferences

Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture

April 20, 2011

Author(s)

Thomas A. Germer, Martin Foldyna, Brent Bergner

We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line...

Mueller matrix bidirectional reflectance distribution function measurements and modeling of diffuse reflectance standards

April 20, 2011

Author(s)

Thomas A. Germer, Heather J. Patrick

We measure the Mueller matrix bidirectional reflectance distribution function (BRDF) of pressed and sintered powdered polytetrafluoroethylene (PTFE) reflectance...

TSOM Method for Semiconductor Metrology

April 18, 2011

Author(s)

Ravikiran Attota, Ronald G. Dixson, John A. Kramar, James E. Potzick, Andras Vladar, Benjamin D. Bunday, Erik Novak, Andrew C. Rudack

Through-focus scanning optical microscopy (TSOM) is a new metrology method that achieves 3D nanoscale measurement resolution using conventional optical...

Nested Uncertainties and Hybrid Metrology to Improve Measurement Accuracy

April 18, 2011

Author(s)

Richard M. Silver, Nien F. Zhang, Bryan M. Barnes, Hui Zhou, Jing Qin, Ronald G. Dixson

In this paper we present a method to combine measurement techniques that reduce uncertainties and improve measurement throughput. The approach has immediate...

Development of Probe Free Mapping of Cell Viability in Hydrogels

April 16, 2011

Author(s)

Joy P. Dunkers, Kaushik Chatterjee, Carl G. Simon Jr.

Diffusion of oxygen in cell/scaffold construct interior is of critical importance to cell viability in constructs of clinically relevant sizes. It has been...

Load Combination Requirements in ASCE Standard 7-10: New Developments

April 14, 2011

Author(s)

Therese P. McAllister, Bruce Ellingwood

The fundamental load combination requirements for strength design (or load and resistance factor design) appearing in Section 2.3 of ASCE Standard 7-10 advance...

A Feature-preserved Canonical Form for Non-rigid 3D Meshes

April 14, 2011

Author(s)

Zhouhui Lian, Afzal A. Godil

Measuring the dissimilarity between non-rigid objects is a challenging problem in 3D shape retrieval. One potential solution is to construct the models 3D...

SHREC11 Track: Generic Shape Retrieval

April 14, 2011

Author(s)

Helin Dutagaci, Afzal A. Godil

In this paper we present the results of the 3D Shape Retrieval Contest 2011 (SHREC11) track on generic shape retrieval. The aim of this track is to evaluate...

Reference Modulation for Calibrated Measurements of Tag Backscatter

April 14, 2011

Author(s)

Daniel G. Kuester, David R. Novotny, Jeffrey R. Guerrieri, Randy Direen, Zoya Popovic

We present a model and reference backscatter device for calibrating measurements of 860-960 MHz Ultra-High Fre- quency (UHF) tag backscattering. The model...

Nonlinear Dynamic Analysis of Structures Using Modal Superposition

April 13, 2011

Author(s)

Kevin K. Wong

A fast nonlinear dynamic analysis algorithm based on modal superposition of structural response incorporating both material and geometric nonlinearities is...

MODELING OF U.S. CORN ETHANOL INDUSTRIAL GROWTH

April 13, 2011

Author(s)

Deogratias Kibira, Guodong Shao, Stephen Nowak

The production capacity of corn ethanol as a transportation fuel is experiencing rapid growth in the United States. The demand is driven by increased prices of...

Online Monitoring of Tissue-Engineered Cartilage Development in a Dynamic Compression Bioreactor

April 13, 2011

Author(s)

Jenni R. Popp, Justine Roberts, Stephanie Bryant, Timothy P. Quinn

A New Interface Defect Spectroscopy Method

April 12, 2011

Author(s)

Jason T. Ryan, Liangchun (. Yu, Jae Han, Joseph J. Kopanski, Kin P. Cheung, Fei Zhang, C Wang, Jason P. Campbell, John S. Suehle, Vinayak Tilak, Jody Fronheiser

A new interface defect spectroscopy method based on variable height charge pumping capable of observing the amphoteric nature of Si/SiO2 interface states in...

A New Interface Defect Spectroscopy Method

April 11, 2011

Author(s)

Jason T. Ryan, Liangchun (. Yu, Jae Han, Joseph J. Kopanski, Kin P. Cheung, Fei Zhang, Chen Wang, Jason P. Campbell, John S. Suehle, Viniyak Tilak, Jody Fronheiser

A new interface defect spectroscopy method based on variable height charge pumping capable of observing the amphoteric nature of Si/SiO2 interface states in...

Electromigration of Cu Interconnects Under AC, Pulsed-DC and DC Test Conditions - Ramifications on Accelerated Testing

April 10, 2011

Author(s)

Robert R. Keller, David T. Read, Roey Shaviv, Greg Harm, Sangita Kumari

Electromigration (EM) of a dual damascene, single-via fed, test vehicle was measured using DC, AC followed by DC, and three rectangular-wave DC stressing...

Analysis of Sustainable Manufacturing Using Simulation for Integration of Production and Building Service

April 7, 2011

Author(s)

John L. Michaloski, Guodong Shao, Jorge Arinez, Kevin W. Lyons, Swee K. Leong, Frank H. Riddick

The desire to be environmentally sustainable gives manufacturers the necessary impetus to implement "green" technology that previously may have been regarded as...

SHREC11 Track: Shape Retrieval on Non-rigid 3D Watertight Meshes

April 7, 2011

Author(s)

Zhouhui Lian, Afzal A. Godil

Non-rigid 3D shape retrieval has become an important research topic in content-based 3D object retrieval. The aim of this track is to measure and compare the...

Evaluation of 3D Interest Point Detection Techniques

April 7, 2011

Author(s)

Helin Dutagaci, Chun Pan (Benny) Cheung, Afzal A. Godil

In this paper, we compare the results of five 3D interest point detection techniques to the interest points marked by human subjects. This comparison is used to...

Salient Local 3D Features for 3D Shape Retrieval

April 7, 2011

Author(s)

Afzal A. Godil, Asim Wagan

In this paper we describe a new formulation for the 3D salient local features based on the voxel grid inspired by the Scale Invariant Feature Transform (SIFT)...

Communicating the Emergency: Preliminary findings on the elements of an effective public warning message

April 4, 2011

Author(s)

Erica D. Kuligowski

When an emergency occurs, it is not always sufficient to simply initiate alarm bells. Individuals may not know what the alarm bell means and, in turn, respond...

HOW DO YOU MEASURE SUSTAINABILITY?

April 1, 2011

Author(s)

Joshua D. Kneifel

Primary Calibration of Accelerometers by Optical Methods, NIST and USAF

April 1, 2011

Author(s)

Beverly F. Payne, Jerry Steffen

This paper describes ongoing efforts to provide high quality calibration of accelerometers by NIST for military and civilian labs. Traditionally the approach is...

Validating the Inspection Results Specification of the Quality Information Framework (QIF)

April 1, 2011

Author(s)

Fiona Zhao, William G. Rippey

The Quality Information Framework (QIF) is a new standards effort to define standard information interfaces in dimensional inspection. Validating a...

NISTs High Frequency Metrology Programs: Current Capabilities and Future Directions

March 31, 2011

Author(s)

Ronald A. Ginley

There are several core areas that are covered by the NIST microwave metrology services. These include thermal noise, power, scattering-parameters (s-parameters)...

Pressure Controlled Advanced Distillation Curve Analysis on Biodiesel Fuels

March 27, 2011

Author(s)

Bret Windom, Tara M. Lovestead, Thomas J. Bruno

Biodiesel fuel is an alternative fuel that can be derived from a number of renewable feedstocks including plant and vegetable oils, algae, animal fats, waste...

Density, Speed of Sound, and Viscosity Measurements of Alternative Aviation Turbine Fuels

March 27, 2011

Author(s)

Tara J. Fortin, Stephanie L. Outcalt

High fuel costs, the need to secure supply chains, and environmental concerns, have all led to an increasing interest in nonpetroleum sources such as natural...

Thermoreversible Gels from Mixtures of a High-melting Ionic Liquid and a Polar Polymer for Self-Healing Materials

March 27, 2011

Author(s)

Joonsung (. Yoon, Christopher Stafford

We investigate a new kind of PVOH physical gel in which the volatile water is replaced with a non-volatile ionic liquid (IL). High melting IL containing Br-...

Modeling the transfer of line edge roughness from an EUV mask to the wafer

March 25, 2011

Author(s)

Gregg M. Gallatin, Patrick Naulleau

Contributions to line edge roughness (LER) from extreme ultraviolet (EUV) masks have recently been shown to be an issue of concern for both the accuracy of...

Optics contamination studies in support of high-throughput EUV lithography tools

March 25, 2011

Author(s)

Shannon B. Hill, Fardina Asikin, Lee J. Richter, Steven E. Grantham, Charles S. Tarrio, Thomas B. Lucatorto, Sergiy Yulin, Mark Schurmann, Viatcheslav Nesterenko, Torsten Feigl

We report on optics contamination rates induced by exposure to broad-bandwidth, high-intensity EUV radiation peaked near 8 nm in a new beamline at the NIST...

Comparison of Electrical Techniques for Magnetization Dynamics Measurements in Micro/Nanoscale Structures

March 25, 2011

Author(s)

SangHyun S. Lim, Thomas M. Wallis, Atif A. Imtiaz, Dazhen Gu, Pavel Kabos, Pavol Krivosik

We compared three electrical detection techniques; differential resistance (dV/dI), RF/microwave transmission, and spin rectification measurements for...

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