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Nanotechnology

Nanoelectronics

News and Updates

Projects and Programs

3D rendered STM image

Designing Advanced Scanning Probe Microscopy Instruments

Ongoing
SPM is a general acronym for various probe instruments. The "P" in SPM stands for various types of probe measurements, such as capacitance (C), force (F), tunneling (T), etc. The scanning tunneling microscope (STM), including custom designs at the CNST, uses the quantum mechanical principle of...
joint quantum institute

Designing the Nanoworld: Nanostructure, Nanodevices, and Nano-optics

Ongoing
Developing and exploiting nanodevices for quantum and nanotechnologies requires nanoscale and atomic scale modeling of ultrasmall structures, devices, their operation, and their response to probes. Key challenges of understanding physics at the quantum/classical interface and measurement at the...
EUV graphs

Dynamic EUV Imaging and Spectroscopy for Microelectronics

Ongoing
Collaborations with industry leaders have led us to develop new measurement techniques to improve our understanding thermal transport, spin transport, and nanoscopic (and interfacial) material properties in active device structures. Such capability requires the ability to measure these properties at...

Publications

Harnessing the extreme ultraviolet for critical dimension metrology

Author(s)
Bryan Barnes, Purnima P. Balakrishnan, John Burnett, Aaron Chew, Colton Dudley, Thomas Germer, Steven Grantham, Stephanie Moffitt, Eric Shirley, Martin Sohn, Daniel Sunday
The semiconductor industry has long adopted visible and ultraviolet wavelengths for optical critical dimension (OCD) measurements. Decreasing feature sizes...

Software

MOSAIC Icon

MOSAIC

MOSAIC is a modular single-molecule analysis toolbox to decode multi-state single-molecule and nanopore time-series data. Read the documentation for additional

Tools and Instruments

Examples of work in the Precision Imaging Facility.  (a) STEM image of a crack (dislocation) formed during growth of an AlGaN shell around a GaN nanowire, and (b) FIB fabrication of an AFM tip with a GaN nanowire contact point.

Precision Imaging Facility

The Precision Imaging Facility (PIF) is a cooperative research facility at the National Institute of Standards and Technology (NIST) dedicated to the
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