Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

J. Phys. & Chem. Ref. Data (JPCRD)

Electron Interactions with c-C4F8

Author(s)
Loucas G. Christophorou, James K. Olthoff
The limited electron collision cross-section and transport-coefficient data for the plasma processing gas perfluorocyclobutane (c-C 4F 8) are synthesized

Electron Interactions with CF3I

Author(s)
Loucas G. Christophorou, James K. Olthoff
Low-energy electron collision data for the plasma processing gas CF 3I are sparse. Limited cross section data are available only for total and differential

Electron Interactions With SF6

Author(s)
Loucas G. Christophorou, James K. Olthoff
Sulfur hexafluoride (SF 6) is commonly used as a gaseous dielectric and as a plasma etching gas. In this work, the state of knowledge on electron-interaction

Electron Interactions With Cl2

Author(s)
Loucas G. Christophorou, James K. Olthoff
Low energy electron interactions with the Cl 2 molecule are reviewed. Information is synthesized and assessed on the cross sections for total electron