Electron Interactions With SF6

Published

January 1, 2000

Author(s)

Loucas G. Christophorou, James K. Olthoff

Abstract

Sulfur hexafluoride (SF₆) is commonly used as a gaseous dielectric and as a plasma etching gas. In this work, the state of knowledge on electron-interaction cross sections and electron-swarm parameters in SF₆ is comprehensively reviewed and critically assessed. Cross sections are presented and discussed for the following scattering processes: total electron scattering; differential elastic; elastic integral; elastic momentum; total vibrational; total and partial ionization; total dissociative and nondissociative electron attachment; dissociation into neutrals. Coefficients for electron-impact ionization, effective ionization, electron attachment , electron drift, and electron diffusion are also reviewed and assessed.

Citation

J. Phys. & Chem. Ref. Data (JPCRD) -

Volume

29

Issue

3

NIST Pub Series

J. Phys. & Chem. Ref. Data (JPCRD)

Pub Type

NIST Pubs

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Keywords

coefficients, cross sections, electron scattering, electron swarms, electron transport, ionization, SF6, sulfur hexafluoride

Citation

Christophorou, L. and Olthoff, J. (2000), Electron Interactions With SF₆, J. Phys. & Chem. Ref. Data (JPCRD), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=7801 (Accessed October 20, 2025)