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Metrology

Dimensional metrology

News and Updates

artifact

Back to the Future: Gear Edition

As mechanical objects, gears have been around for so long that people may take them for granted. But gears are sophisticated parts that play a vital role in

Blog Posts

View from the back of a darkened movie theater shows the heads of the audience and a screen reading: Measurement in the Movies.

Measurement in the Movies

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Title card reads "A Scientific Christmas Tale" with the NIST logo in a wreath and flashing holiday lights.

A Scientific Christmas Tale

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A white telescope dish is surrounded by wooded mountains in autumn colors.

In Case You Missed It From NIST: 2021 Edition

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Events

Projects and Programs

Microplastic and Nanoplastic Metrology

Ongoing
The Micro and Nanoplastic (MNP) Metrology Project aims to develop a toolbox of methods for size-based separations from complex matrices, chemical characterization protocols, and test materials necessary to enable quantification of micro- and nano-sized plastic particles, a need articulated by our
Laser tracker calibration in Tape Tunnel Facility

Advanced Dimensional Measurement Systems

Ongoing
New dimensional measurement technologies provide significant benefits to industry such as increasing measurement throughput, enabling new manufacturing process and providing more detailed part information for manufacturing process improvement. However, before purchasing and using new measurement

Qualification for AM Feedstocks, Machines and Processes

Completed
Objective - To develop, utilize, and analyze test methods and protocols for characterizing the feedstocks, machines, and processes in metal-based additive manufacturing to enable optimum usage and to reduce the cost and time needed for qualification. What is the Technical Idea? Qualification of AM

Data Integration and Management for Additive Manufacturing

Completed
Objective Data plays the most critical role in linking AM lifecycle and value chain activities and streamlining the AM development process. While the AM data from a single build is essential for establishing part traceability, when methodically collected, the full processing history of thousands of

Publications

Lab-based multi-wavelength EUV diffractometry for critical dimension metrology

Author(s)
Bryan Barnes, Aaron Chew, Nicholas Jenkins, Yunzhe Shao, Martin Sohn, Regis Kline, Daniel Sunday, Purnima Balakrishnan, Thomas Germer, Steven Grantham, Clay Klein, Stephanie Moffitt, Eric Shirley, Henry Kapteyn, MARGARET MURNANE
Background: The industry is developing extreme-ultraviolet wavelength (EUV) techniques to measure critical dimensions (CDs) in logic fabrication. As nascent

Detection limits of AI-based SEM dimensional metrology

Author(s)
Peter Bajcsy, Brycie Wiseman, Michael Paul Majurski, Andras Vladar
The speed of in-line scanning electron microscope (SEM) measurements of linewidth, contact hole, and overlay is critically important for identifying the

Tools and Instruments

Laser Doppler Vibrometer located in 218/D012 (Group 643.09)

Laser Doppler Vibrometer Microscope

Since 2006, the Nanomechanical Properties Group has pioneered the use of Laser Doppler Vibrometry (LDV) to calibrate the stiffness of AFM cantilevers using the
Examples of work in the Precision Imaging Facility.  (a) STEM image of a crack (dislocation) formed during growth of an AlGaN shell around a GaN nanowire, and (b) FIB fabrication of an AFM tip with a GaN nanowire contact point.

Precision Imaging Facility

The Precision Imaging Facility (PIF) is a cooperative research facility at the National Institute of Standards and Technology (NIST) dedicated to the