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PUBLICATIONS

Soft X-ray Characterization of DSA Block Copolymers

Published

Author(s)

Daniel F. Sunday, Wen-Li Wu, Regis J. Kline
Volume
12
Issue
3
Conference Dates
March 25-28, 2013
Conference Location
Gaithersburg, MD
Conference Title
2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics
Pub Type
Conferences

Download Paper

https://doi.org/10.1117/1.JMM.12.3.031103

Keywords

DSA, Block Copolymers, X-ray, Soft X-ray
Lithography and Self-assembly

Citation

Sunday, D. , Wu, W. and Kline, R. (2013), Soft X-ray Characterization of DSA Block Copolymers, 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD, [online], https://doi.org/10.1117/1.JMM.12.3.031103 (Accessed October 28, 2025)

Issues

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Created August 12, 2013, Updated November 10, 2018
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