@conference{10491, author = {Daniel Sunday and Wen-Li Wu and Regis Kline}, title = {Soft X-ray Characterization of DSA Block Copolymers}, year = {2013}, number = {12}, month = {2013-08-12}, publisher = {2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD}, doi = {https://doi.org/10.1117/1.JMM.12.3.031103}, language = {en}, }