TY - CONF AU - Daniel Sunday AU - Wen-Li Wu AU - Regis Kline C2 - 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD DA - 2013-08-12 DO - https://doi.org/10.1117/1.JMM.12.3.031103 LA - en M1 - 12 PB - 2013 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Gaithersburg, MD PY - 2013 TI - Soft X-ray Characterization of DSA Block Copolymers ER -