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Search Publications by: Michael J. Fasolka (Fed)

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Displaying 101 - 125 of 134

Characterizing Surface Roughness of Thin Films by Polarized Light Scattering

November 1, 2003
Author(s)
Thomas A. Germer, Michael J. Fasolka
The polarization of light scattered by the surface of a material contains information that can be used to identify the sources of that scatter. In this paper, first order vector perturbation theory for light scattering from interfacial roughness of a

Fourier Analysis Near-Field Polarimetry for Measurement of Local Optical Properties of Thin Films

July 1, 2003
Author(s)
Lori S. Goldner, Michael J. Fasolka, S Nougier, H P. Nguyen, Garnett W. Bryant, Jeeseong Hwang, K D. Weston, Kathryn L. Beers, A Urbas, Edwin L. Thomas
We present measurements of the local dichroism and birefringence of thin film specimens us ing techniques that combine near-field scanning optical microscopy (NSOM) and a novel polarization modulation (PM) polarimetry utilizing Fourier analysis of the

Chemically Amplified Resist Fundamentals Studies by Combinatorial approaches

March 1, 2003
Author(s)
M Wang, Vivek Prabhu, Eric K. Lin, Michael J. Fasolka, Alamgir Karim
Sub-100 nm lithography requires more understanding of photoresist material properties and processing conditions to achieve necessary critical dimension control of patterned structures. As resist thickness and feature linewidth decrease, fundamental

Near-Field Polarimetric Characterization of Semi-Crystalline Polymer Systems

March 1, 2003
Author(s)
S N. Goldie, Michael J. Fasolka, Lori S. Goldner, Jeeseong C. Hwang, Kathryn Beers
We have studied crystallization in thin films of isotactic polystyrene (iPS) to better understand the morphology and formation of these structures through the use of polarization modulation near-field scanning optical microscopy (PM-NSOM). Polymer

Nanoscale Chemical Imaging of Polymeric Materials With Atomic Force Microscopy

February 26, 2003
Author(s)
Xiaohong Gu, Tinh Nguyen, Michael J. Fasolka, D Julthongpiput, Lei Chen, Mark R. VanLandingham, Y C. Jean, Jonathan W. Martin
Nanoscale spatial chemical information is essential to developing a molecular-level understanding of a variety of phenomena occurring at surfaces and interfaces, including adhesion, friction, and surface reactivity. Therefore, the ability to probe and