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Search Publications by: Eric L. Shirley (Fed)

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Displaying 201 - 225 of 373

The Trouble with Calcium Floride

March 1, 2002
Author(s)
John H. Burnett, Zachary H. Levine, Eric L. Shirley
We discuss the intrinsic birefringence of calcium fluoride and othercrystalline materials that may be used in the optics for 193nm and 157nmlithography, including the characterization of the effect and itsimplications for performance of lens systems at

Diffraction Corrections in Radiometry: A Proposed Method to Estimate Uncertainties

January 1, 2002
Author(s)
Eric L. Shirley, Raghu N. Kacker, Raju V. Datla
Radiometric determination of certain quantities, such as source radiance, geometrical aspects of an optical system (e.g., throughput, aperture areas and detector response relies heavily on the mathematical principles governing geometrical optics. These

Excitonic Effects on Optical Second-Harmonic Polarizabilities of Semiconductors

January 1, 2002
Author(s)
E K. Chang, Zachary H. Levine, Eric L. Shirley
We present an ab initio many-body formalism for computing the frequency-dependent second-harmonic polarizability of semiconductor materials that includes both local-field and excitonic effects. We calculate the second-harmonic polarizability for AIP, AIAs