U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

The Trouble with Calcium Floride

Published

Author(s)

John H. Burnett, Zachary H. Levine, Eric L. Shirley

Abstract

We discuss the intrinsic birefringence of calcium fluoride and othercrystalline materials that may be used in the optics for 193nm and 157nmlithography, including the characterization of the effect and itsimplications for performance of lens systems at these wavelengths. Wediscuss and assess the approaches by the lithography systems designers todeal with the effect.
Citation
The Trouble with Calcium Floride
Volume
2
Issue
No. 3
Pub Type
Others

Keywords

157 nm Lithography, BaF2, barium fluoride, birefringence, CaF2, calcium fluoride

Citation

Burnett, J. , Levine, Z. and Shirley, E. (2002), The Trouble with Calcium Floride, The Trouble with Calcium Floride (Accessed January 21, 2026)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created March 1, 2002, Updated February 17, 2017
Was this page helpful?