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The Trouble with Calcium Floride

Published

Author(s)

John H. Burnett, Zachary H. Levine, Eric L. Shirley

Abstract

We discuss the intrinsic birefringence of calcium fluoride and othercrystalline materials that may be used in the optics for 193nm and 157nmlithography, including the characterization of the effect and itsimplications for performance of lens systems at these wavelengths. Wediscuss and assess the approaches by the lithography systems designers todeal with the effect.
Citation
The Trouble with Calcium Floride
Volume
2
Issue
No. 3

Keywords

157 nm Lithography, BaF2, barium fluoride, birefringence, CaF2, calcium fluoride

Citation

Burnett, J. , Levine, Z. and Shirley, E. (2002), The Trouble with Calcium Floride, The Trouble with Calcium Floride (Accessed April 23, 2024)
Created March 1, 2002, Updated February 17, 2017