Burnett, J.
, Levine, Z.
and Shirley, E.
(2002),
The Trouble with Calcium Floride, The Trouble with Calcium Floride (Accessed October 16, 2026)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
The Trouble with Calcium Floride
Published
Author(s)
John H. Burnett, ,
Abstract
We discuss the intrinsic birefringence of calcium fluoride and othercrystalline materials that may be used in the optics for 193nm and 157nmlithography, including the characterization of the effect and itsimplications for performance of lens systems at these wavelengths. Wediscuss and assess the approaches by the lithography systems designers todeal with the effect.Citation
The Trouble with Calcium Floride
Volume
2
Issue
No. 3
Pub Type
Others
Keywords
157 nm Lithography, BaF2, barium fluoride, birefringence, CaF2, calcium fluoride
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created March 1, 2002, Updated February 17, 2017