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Intrinsic Birefringence in Crystalline Optical Materials: A New Concern for Lithography

Published

Author(s)

J H. Burnett, Zachary H. Levine, Eric L. Shirley
Citation
Future Fab International
Volume
12

Citation

Burnett, J. , Levine, Z. and Shirley, E. (2002), Intrinsic Birefringence in Crystalline Optical Materials: A New Concern for Lithography, Future Fab International (Accessed July 18, 2024)

Issues

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Created December 31, 2001, Updated October 12, 2021