Burnett, J.
, Levine, Z.
and Shirley, E.
(2002),
Intrinsic Birefringence in Crystalline Optical Materials: A New Concern for Lithography, Future Fab International
(Accessed May 4, 2025)
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Intrinsic Birefringence in Crystalline Optical Materials: A New Concern for Lithography
Published
Author(s)
J H. Burnett, ,
Citation
Future Fab International
Volume
12
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 2001, Updated October 12, 2021