@article{832331,
  author = {J Burnett and Zachary Levine and Eric Shirley},
  title = {Intrinsic Birefringence in Crystalline Optical Materials: A New Concern for Lithography},
  year = {2002},
  number = {12},
  month = {2002-01-01 00:01:00},
  publisher = {Future Fab International},
  language = {en},
}