TY  - JOUR
AU  - J Burnett
AU  - Zachary Levine
AU  - Eric Shirley
C2  - Future Fab International
DA  - 2002-01-01 00:01:00
LA  - en
M1  - 12
PB  - Future Fab International
PY  - 2002
TI  - Intrinsic Birefringence in Crystalline Optical Materials: A New Concern for Lithography
ER  -