Implications of Intrinsic Birefringence for 157 nm Lithography

J H. Burnett; Zachary H. Levine; Eric L. Shirley

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PUBLICATIONS

Implications of Intrinsic Birefringence for 157 nm Lithography

Published

January 1, 2002

Author(s)

J H. Burnett, Zachary H. Levine, Eric L. Shirley

Citation

OE Magazine

Volume

Pub Type

Journals

Citation

Burnett, J. , Levine, Z. and Shirley, E. (2002), Implications of Intrinsic Birefringence for 157 nm Lithography, OE Magazine (Accessed April 26, 2026)

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Issues

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Created December 31, 2001, Updated October 12, 2021

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