Burnett, J.
, Levine, Z.
and Shirley, E.
(2002),
Implications of Intrinsic Birefringence for 157 nm Lithography, OE Magazine
(Accessed January 15, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Implications of Intrinsic Birefringence for 157 nm Lithography
Published
Author(s)
J H. Burnett, ,
Citation
OE Magazine
Volume
23
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 2001, Updated October 12, 2021