@article{832156,
  author = {J Burnett and Zachary Levine and Eric Shirley},
  title = {Implications of Intrinsic Birefringence for 157 nm Lithography},
  year = {2002},
  number = {23},
  month = {2002-01-01 00:01:00},
  publisher = {OE Magazine},
  language = {en},
}