TY  - JOUR
AU  - Burnett, J
AU  - Levine, Zachary
AU  - Shirley, Eric
C2  - OE Magazine
DA  - 2002-01-01 00:01:00
LA  - en
M1  - 23
PB  - OE Magazine
PY  - 2002
TI  - Implications of Intrinsic Birefringence for 157 nm Lithography
ER  -