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Search Publications by: Johannes A. Soons (Fed)

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Displaying 51 - 61 of 61

Smart Machining Research at the National Institute of Standards and Technology

September 23, 2003
Author(s)
Kevin K. Jurrens, Johannes A. Soons, Robert W. Ivester
This paper presents an overview of collaborative research activities conducted by staff of the Manufacturing Engineering Laboratory at the National Institute of Standards and Technology to address the enabling metrology and standards infrastructure needed

Performance Evaluation of a Prototype Machine Tool for Machining Meso-scaled Parts

January 1, 2003
Author(s)
Bradley N. Damazo, M A. Donmez, Michael L. McGlauflin, J B. Werkmeister, Johannes A. Soons, S C. Bryant, Alex Slocum
With the increased prevalence of meso-scaled products and feature sizes, new tools are needed to bridge the gap between fabrication processes tailored for micrometer and millimeter sized features [1-4]. Compared to its traditional counterpart, a small

New Optical Metrology at NIST for Semiconductor Lithography

April 17, 2002
Author(s)
Ulf Griesmann, Tony L. Schmitz, Johannes A. Soons
Optical semiconductor lithography in the deep ultraviolet (DUV) and next generation lithographies such as extreme ultraviolet lithography (EUVL) create many new challenges for surface figure metrology. We discuss the needs for flatness metrology of silicon

Embedded Power Quality Solutions for Computer Numerical Control Machine Tools

January 1, 2001
Author(s)
Bradley N. Damazo, M Stephens, Johannes A. Soons, M A. Donmez
Electric Power Research Institute (EPRI) research and testing, conducted over many years, has indicated that variations in electric power quality can negatively impact end-use equipment. This research and testing has helped to form the theory that the

Information Model for Machine Tool Performance Tests

November 1, 2000
Author(s)
Yung-Tsun T. Lee, M A. Donmez, Johannes A. Soons
This report specifies an information model of machine tool performance evaluation tests. The information model provides a mechanism capable of describing the properties and results of machine tool performance tests. The objective of the information model

Measuring the Geometric Errors of a Hexapod Machine Tool

January 1, 1999
Author(s)
Johannes A. Soons
This paper describes procedures to measure the geometric errors of parallel kinematic machines with a Gough configuration. The procedures are applied to estimate and compensate the errors of a prototype hexapod milling machine.

On the Geometric and Thermal Errors of a Hexapod Machine Tool

January 1, 1999
Author(s)
Johannes A. Soons
This paper describes the measurement and analysis of the quasi-static errors of a prototype hexapod milling machine located at the National Institute of Standards and Technology (NIST). Emphasis is placed on a) identification of the most important

Error Analysis of a Hexapod Machine Tool

April 3, 1997
Author(s)
Johannes A. Soons
This paper describes the measurement and analysis of the quasi-static errors of a prototype hexapod milling machine at the National Institute of Standards and Technology (NIST). Emphasis is placed on a) the identification and definition of the parametric