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Search Publications by: Thomas A. Germer (Fed)

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Displaying 76 - 100 of 385

Intercomparison between optical and x-ray scatterometry measurements of FinFET structures

April 8, 2013
Author(s)
Paul Lemaillet, Thomas Germer, Regis J. Kline, Daniel Sunday, Chengqing C. Wang, Wen-Li Wu
In this paper, we present a comparison of profile measurements of vertical field effect transistor (FinFET) fin arrays by optical critical dimension (OCD) metrology and critical dimension small angle X-ray scattering (CD-SAXS) metrology. Spectroscopic

Remote sensing of chiral signatures on Mars

November 1, 2012
Author(s)
William Sparks, James H. Hough, Thomas Germer, Frank Robb, Ludmilla Kolokolova
We describe circular polarization as a remote sensing diagnostic of chiral signatures which may be applied to Mars. The remarkable phenomenon of homochirality provides a unique biosignature which can be amenable to remote sensing through circular

Anisotropic, Hierarchical Surface Patterns via Surface Wrinkling of Nanoimprinted Polymer Films

October 22, 2012
Author(s)
Junghyun Lee, Hyun W. Ro, Rui Huang, Thomas Germer, Paul Lemaillet, Christopher Soles, Christopher Stafford
we demonstrated the wrinkling behavior of nanopatterned PS films, whose wrinkle wavelength and resultant morphology depend strongly on geometric parameters of surface patterns as well as the direction of the applied strain relative to the nanopattern

Upper roughness limitations on the TIS/RMS relationship

September 27, 2012
Author(s)
J C. Stover, Sven Schroeder, Thomas Germer
The relationship between total integrated scatter (TIS) and root mean square (rms) roughness was developed in the radar literature and enabled the first use of scatter measurements to monitor optical roughness. This relationship has been used and misused

A compact and robust method for full Stokes spectropolarimetry

August 1, 2012
Author(s)
William Sparks, Thomas Germer, John MacKenty, Frans Snik
We present an approach to spectropolarimetry which requires neither moving parts nor time dependent modulation, and which o ers the prospect of achieving high sensitivity. The concept, which is one of those generically known as channeled polarimetry, is to

Out-of-plane Stokes imaging polarimeter for early skin cancer diagnosis

July 1, 2012
Author(s)
P. Ghassemi, Paul Lemaillet, Thomas Germer, J. W. Shupp, S. Venna, M. E. Boisvert, K. E. Flanagan, M. H. Jordan, J. C. Ramella-Roman
Optimal treatment of skin cancer before it metastasizes depends critically on early diagnosis and treatment. Imaging spectroscopy and polarized remittance have been utilized in the past for diagnostic purposes, but valuable information can be also obtained

Differential matrices for depolarizing media

March 1, 2012
Author(s)
Thomas A. Germer
The evolution of a Stokes vector through depolarizing media is considered. A general form for the differential matrix is derived that is appropriate in the presence of depolarization, and is parameterized in a manner that ensures that it yields, upon

A Traceable Scatterometry Measurement of a Silicon Line Grating

May 26, 2011
Author(s)
Thomas A. Germer, Heather J. Patrick, Ronald G. Dixson
In this paper, we present a spectroscopic Mueller matrix ellipsometry measurement of a silicon line grating with nominal pitch of 600 nm and line width 100 nm. An uncertainty analysis is performed on the measurement results. The results are compared to

Effects of Roughness on Scatterometry Signatures

May 26, 2011
Author(s)
Martin Foldyna, Thomas Germer, Brent Bergner
We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). Grating profiles were determined from multiple azimuthal configurations