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Search Publications by: Thomas A. Germer (Fed)

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Displaying 51 - 75 of 354

Upper roughness limitations on the TIS/RMS relationship

September 27, 2012
Author(s)
J C. Stover, Sven Schroeder, Thomas Germer
The relationship between total integrated scatter (TIS) and root mean square (rms) roughness was developed in the radar literature and enabled the first use of scatter measurements to monitor optical roughness. This relationship has been used and misused

A compact and robust method for full Stokes spectropolarimetry

August 1, 2012
Author(s)
William Sparks, Thomas Germer, John MacKenty, Frans Snik
We present an approach to spectropolarimetry which requires neither moving parts nor time dependent modulation, and which o ers the prospect of achieving high sensitivity. The concept, which is one of those generically known as channeled polarimetry, is to

Out-of-plane Stokes imaging polarimeter for early skin cancer diagnosis

July 1, 2012
Author(s)
P. Ghassemi, Paul Lemaillet, Thomas Germer, J. W. Shupp, S. Venna, M. E. Boisvert, K. E. Flanagan, M. H. Jordan, J. C. Ramella-Roman
Optimal treatment of skin cancer before it metastasizes depends critically on early diagnosis and treatment. Imaging spectroscopy and polarized remittance have been utilized in the past for diagnostic purposes, but valuable information can be also obtained

Differential matrices for depolarizing media

March 1, 2012
Author(s)
Thomas A. Germer
The evolution of a Stokes vector through depolarizing media is considered. A general form for the differential matrix is derived that is appropriate in the presence of depolarization, and is parameterized in a manner that ensures that it yields, upon

A Traceable Scatterometry Measurement of a Silicon Line Grating

May 26, 2011
Author(s)
Thomas A. Germer, Heather J. Patrick, Ronald G. Dixson
In this paper, we present a spectroscopic Mueller matrix ellipsometry measurement of a silicon line grating with nominal pitch of 600 nm and line width 100 nm. An uncertainty analysis is performed on the measurement results. The results are compared to

Effects of Roughness on Scatterometry Signatures

May 26, 2011
Author(s)
Martin Foldyna, Thomas Germer, Brent Bergner
We used azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line edge roughness (LER). Grating profiles were determined from multiple azimuthal configurations

Generalized ellipsometry of artificially designed line width roughness

December 10, 2010
Author(s)
Martin Foldyna, Thomas A. Germer, Brent Bergner, Ronald G. Dixson
We use azimuthally-resolved spectroscopic Mueller matrix ellipsometry to study a periodic silicon line structure with and without artificially-generated line width roughness (LWR). We model the artificially perturbed grating using 1D and 2D rigorous

Effect of Bandwidth and Numerical Aperture in Optical Scatterometry

March 1, 2010
Author(s)
Thomas A. Germer, Heather J. Patrick
We consider the effects of finite spectral bandwidth and numerical aperture in scatterometry measurements and discuss efficient integration methods based upon Gaussian quadrature in one dimension (for spectral bandwidth averaging) and two dimensions inside