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Search Publications by: James E Proctor (Assoc)

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Displaying 1 - 12 of 12

Generalized Electrical Substitution Methods and Detectors for Absolute Optical Power Measurements

June 17, 2022
Author(s)
Solomon I. Woods, Jorge Neira, James E. Proctor, Joseph P. Rice, Nathan Tomlin, Malcolm White, Michelle Stephens, John H. Lehman
We have developed generalized methods for electrical substitution optical measurements, as well as cryogenic detectors which can be used to implement them. The new methods enable measurement of arbitrary periodic waveforms by an electrical substitution

Comparing the Transient Response of a Resistive-Type Sensor With a Thin Film Thermocouple During the Post-Exposure Bake Process

April 1, 2004
Author(s)
Kenneth G. Kreider, D P. DeWitt, J B. Fowler, J E. Proctor, William A. Kimes, Dean C. Ripple, Benjamin K. Tsai
Recent studies on dynamic temperature profiling and lithographic performance modeling of the post-exposure bake (PEB) process have demonstrated that the rate of heating and cooling may have an important influence on resist lithographic response. Generally