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Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple During the Post-Exposure Bake Process, Data Analysis and Modeling for Process Control

Published

Author(s)

K G. Kreider, D P. DeWitt, J B. Fowler, James E. Proctor, W A. Kimes, D C. Ripple, Benjamin K. Tsai
Citation
SPIE
Volume
5378

Citation

Kreider, K. , DeWitt, D. , Fowler, J. , Proctor, J. , Kimes, W. , Ripple, D. and Tsai, B. (2004), Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple During the Post-Exposure Bake Process, Data Analysis and Modeling for Process Control, SPIE (Accessed December 3, 2022)
Created December 31, 2003, Updated October 12, 2021