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Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple During the Post-Exposure Bake Process, Data Analysis and Modeling for Process Control

Published

Author(s)

K G. Kreider, D P. DeWitt, J B. Fowler, J E. Proctor, W A. Kimes, D C. Ripple, Benjamin K. Tsai
Citation
SPIE
Volume
5378
Created January 1, 2004, Updated February 17, 2017