Kreider, K.
, DeWitt, D.
, Fowler, J.
, Proctor, J.
, Kimes, W.
, Ripple, D.
and Tsai, B.
(2004),
Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple During the Post-Exposure Bake Process, Data Analysis and Modeling for Process Control, SPIE
(Accessed April 25, 2024)
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Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple During the Post-Exposure Bake Process, Data Analysis and Modeling for Process Control
Published
Author(s)
K G. Kreider, , , , W A. Kimes, D C. Ripple,
Citation
SPIE
Volume
5378
Pub Type
Journals
Citation
Created December 31, 2003, Updated October 12, 2021