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Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple During the Post-Exposure Bake Process, Data Analysis and Modeling for Process Control

Published

Author(s)

K G. Kreider, D P. DeWitt, J B. Fowler, James E. Proctor, W A. Kimes, D C. Ripple, Benjamin K. Tsai
Citation
SPIE
Volume
5378

Citation

Kreider, K. , DeWitt, D. , Fowler, J. , Proctor, J. , Kimes, W. , Ripple, D. and Tsai, B. (2004), Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple During the Post-Exposure Bake Process, Data Analysis and Modeling for Process Control, SPIE (Accessed July 17, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 2003, Updated October 12, 2021