TY  - JOUR
AU  - K Kreider
AU  - D DeWitt
AU  - J Fowler
AU  - James Proctor
AU  - W Kimes
AU  - D Ripple
AU  - Benjamin Tsai
C2  - SPIE
DA  - 2004-01-01 00:01:00
LA  - en
M1  - 5378
PB  - SPIE
PY  - 2004
TI  - Comparing the Transient Response of a Resistive-Type Sensor with a Thin-Film Thermocouple During the Post-Exposure Bake Process, Data Analysis and Modeling for Process Control
ER  -